公开(公告)号：US20220328330A1

公开(公告)日：2022-10-13

申请号：US17842340

申请日：2022-06-16

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

发明人： Chi-Yuan CHU ,  Jen-Ti WANG ,  Wei-Chih CHEN ,  Kuo-Fong CHUANG ,  Cheng-Ho HUNG

IPC分类号： H01L21/67 ,  H01L21/677

摘要： A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.

公开(公告)号：US20210249297A1

公开(公告)日：2021-08-12

申请号：US16787966

申请日：2020-02-11

申请人： TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

发明人： Chi-Yuan CHU ,  Jen-Ti WANG ,  Wei-Chih CHEN ,  Kuo-Fong CHUANG ,  Cheng-Ho HUNG

IPC分类号： H01L21/687 ,  H01L21/67 ,  H01L21/677

摘要： A method of operating a transport system includes detecting an anomalous condition of a wafer transfer vehicle; sending the wafer transfer vehicle along a rail to a diagnosis station adjacent to the rail; and inspecting properties of the wafer transfer vehicle, such as a speed, a weight, an audio frequency, a noise level, a temperature, and an image of the wafer transfer vehicle, by using the diagnosis station.