公开(公告)号：US12159092B2

公开(公告)日：2024-12-03

申请号：US18226677

申请日：2023-07-26

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Inventor： Chia-Ping Chiang ,  Ming-Hui Chih ,  Chih-Wei Hsu ,  Ping-Chieh Wu ,  Ya-Ting Chang ,  Tsung-Yu Wang ,  Wen-Li Cheng ,  Hui En Yin ,  Wen-Chun Huang ,  Ru-Gun Liu ,  Tsai-Sheng Gau

IPC: G06F30/39 ,  G03F1/70 ,  G03F7/00

Abstract: Implementations of the present disclosure provide coloring methods that sort and pre-color nodes of G0-linked networks in a multiple-patterning technology (MPT)-compliant layout design by coordinate. In one embodiment, a method includes identifying target networks in a circuit layout, each target network having two or more linked nodes representing circuit patterns, and each target network being presented in an imaginary X-Y coordinate plane, assigning a first feature to a first node in each target network, the first node is determined using a coordinate-based method, and assigning the first feature and a second feature to remaining nodes in each target network in an alternating manner so that any two immediately adjacent linked nodes in each target network have different features.

公开(公告)号：US11790145B2

公开(公告)日：2023-10-17

申请号：US17853758

申请日：2022-06-29

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Inventor： Chia-Ping Chiang ,  Ming-Hui Chih ,  Chih-Wei Hsu ,  Ping-Chieh Wu ,  Ya-Ting Chang ,  Tsung-Yu Wang ,  Wen-Li Cheng ,  Hui En Yin ,  Wen-Chun Huang ,  Ru-Gun Liu ,  Tsai-Sheng Gau

IPC: G06F30/39 ,  G03F1/70 ,  G03F7/20 ,  G03F7/00

CPC classification number: G06F30/39 ,  G03F1/70 ,  G03F7/70466

Abstract: Implementations of the present disclosure provide coloring methods that sort and pre-color nodes of G0-linked networks in a multiple-patterning technology (MPT)-compliant layout design by coordinate. In one embodiment, a method includes identifying target networks in a circuit layout, each target network having two or more linked nodes representing circuit patterns, and each target network being presented in an imaginary X-Y coordinate plane, assigning a first feature to a first node in each target network, the first node is determined using a coordinate-based method, and assigning the first feature and a second feature to remaining nodes in each target network in an alternating manner so that any two immediately adjacent linked nodes in each target network have different features.