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公开(公告)号：US20230067967A1
公开(公告)日：2023-03-02
申请号：US17461491
申请日：2021-08-30
发明人： Chiao-Hua CHENG , Sheng-Kang YU , Shang-Chieh CHIEN , Wei-Chun YEN , Heng-Hsin LIU , Ming-Hsun TSAI , Yu-Fa LO , Li-Jui CHEN , Wei-Shin CHENG , Cheng-Hsuan WU , Cheng-Hao LAI , Yu-Kuang SUN , Yu-Huan CHEN
摘要： In a method of inspecting an extreme ultraviolet (EUV) radiation source, during an idle mode, a borescope mounted on a fixture is inserted through a first opening into a chamber of the EUV radiation source. The borescope includes a connection cable attached at a first end to a camera. The fixture includes an extendible section mounted from a first side on a lead screw, and the camera of the borescope is mounted on a second side, opposite to the first side, of the extendible section. The extendible section is extended to move the camera inside the chamber of the EUV radiation source. One or more images are acquired by the camera from inside the chamber of the EUV radiation source at one or more viewing positions. The one or more acquired images are analyzed to determine an amount of tin debris deposited inside the chamber of the EUV radiation source.
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公开(公告)号：US20220382048A1
公开(公告)日：2022-12-01
申请号：US17885217
申请日：2022-08-10
发明人： Yu-Chih CHEN , Po-Chung CHENG , Li-Jui CHEN , Shang-Chieh CHIEN , Sheng-Kang YU , Wei-Chun YEN
摘要： An EUV collector mirror for an extreme ultra violet (EUV) radiation source apparatus includes an EUV collector mirror body on which a reflective layer as a reflective surface is disposed, a heater attached to or embedded in the EUV collector mirror body and a drain structure to drain melted metal from the reflective surface of the EUV collector mirror body to a back side of the EUV collector mirror body.
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3.发明公开公开(公告)号：US20240361701A1
公开(公告)日：2024-10-31
申请号：US18767684
申请日：2024-07-09
发明人： Chiao-Hua CHENG , Sheng-Kang YU , Shang-Chieh CHIEN , Wei-Chun YEN , Heng-Hsin LIU , Ming-Hsun TSAI , Yu-Fa LO , Li-Jui CHEN , Wei-Shin CHENG , Cheng-Hsuan WU , Cheng-Hao LAI , Yu-Kuang SUN , Yu-Huan CHEN
IPC分类号： G03F7/00
CPC分类号： G03F7/70483 , G03F7/70033 , G03F7/7085
摘要： A method of inspecting an extreme ultraviolet (EUV) radiation source includes, in an idle mode, inserting a borescope mounted on a fixture through a first opening into a chamber of the EUV radiation source. The borescope includes a connection cable attached at a first end to a camera. The EUV radiation source includes an excitation laser that generates a light beam that is configured to focus onto tin droplets to generate EUV radiation inside the chamber of the EUV radiation source. The method further includes extending the extendible section, in a direction toward the second opening of the EUV radiation source, to move the camera beyond the blocking shield, and acquiring one or more images from a region beyond the blocking shield. The method also includes analyzing the one or more acquired images to determine an amount of tin debris deposited inside the chamber of the EUV radiation source.
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公开(公告)号：US20230309194A1
公开(公告)日：2023-09-28
申请号：US17655918
申请日：2022-03-22
发明人： Wei-Chun YEN , Sheng-Kang YU , Shang-Chieh CHIEN , Li-Jui CHEN , Heng-Hsin LIU
CPC分类号： H05B1/0247 , G03F7/70033 , G03F7/70925 , G03F7/70525 , G05B13/0265 , G03F7/2004
摘要： Some implementations described herein incorporate a heating system to heat a cover of a bucket. A liquified target material, collected by vanes and/or a transport ring within a vessel of an extreme ultraviolet (EUV) radiation source, flows through a drain port of the transport ring and through a conduit that provides the liquified target material to the bucket through an opening of the cover. By heating the cover, the heating system prevents the liquified target material from solidifying at or near the opening before the liquified target material can flow into the bucket. By preventing the solidifying of the liquid target material, a likelihood of a blockage within the conduit and/or the drain port is reduced.
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