公开(公告)号：US11914297B2

公开(公告)日：2024-02-27

申请号：US17251265

申请日：2019-06-17

Applicant: TAMAPOLY CO., LTD.

Inventor： Shinichi Oya ,  Toshiaki Hagiwara ,  Hitoshi Nakamura

IPC: G03F7/11 ,  B32B27/08 ,  B32B27/32 ,  C08J5/18 ,  C08L23/06 ,  G03F7/09

CPC classification number: G03F7/11 ,  B32B27/08 ,  B32B27/32 ,  C08J5/18 ,  C08L23/06 ,  G03F7/094 ,  B32B2255/10 ,  B32B2307/20 ,  C08J2423/06 ,  C08L2203/16 ,  C08L2207/066

Abstract: A cover film for dry film resist, includes a polyethylene film including a first mixture of high pressure low density polyethylene (LDPE) and linear low density polyethylene (LLDPE). The first mixture has an LDPE to LLDPE ratio by mass of from 90:10 to 60:40. The polyethylene film is free of a plasticizer, anti-blocking agent, slipping agent, and anti-static agent. The number of fish eyes having a minimum diameter of 0.2 mm or greater present in 100 m2 of the 19 μm thick cover film in plan view is at most two. The polyethylene film has a thickness of from 10 to 20 μm and a haze value of from 12 to 25%.