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公开(公告)号:US20180013056A1
公开(公告)日:2018-01-11
申请号:US15640747
申请日:2017-07-03
Applicant: TDK CORPORATION
Inventor: Yoshiki OHTA , Satoshi SASAKI , Yoshiaki OHTA , Takahiro KEZUKA , Katsuya INABA , Rin SATO , Kazushi TACHIMOTO , Masayoshi INOUE , Yuzo KOMATSU
IPC: H01L41/083
CPC classification number: H01L41/0838 , H01L41/0471 , H01L41/0472
Abstract: In a piezoelectric element, internal stress generated in an inactive portion at the time of sintering when a piezoelectric element is fabricated or stress applied from the outside to the inactive portion is absorbed by a recess of a lower surface of a first through hole conductor and a recess of an upper surface of a second through hole conductor. Accordingly, for example, deformation, rupture, or the like of the through hole conductor is prevented, and conduction failure or disconnection of an electrode layer or a through hole conductor is prevented. Further, in the inactive portion, since a protrusion of the piezoelectric layer enters the recess of the through hole conductor, a holding force of the piezoelectric layer with respect to the through hole conductor increases, and deformation of the through hole conductor is prevented or obstructed.
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公开(公告)号:US20180219494A1
公开(公告)日:2018-08-02
申请号:US15884785
申请日:2018-01-31
Applicant: TDK CORPORATION
Inventor: Yasuyuki SATOH , Katsumi YAMAUCHI , Katsuya INABA , Yoko ABE
IPC: H02N2/00 , H01L41/047
CPC classification number: H02N2/0015 , H01L41/047 , H01L41/0471 , H01L41/0472 , H01L41/083 , H01L41/293
Abstract: A piezoelectric actuator (1) includes: a piezoelectric element (3); and a first frictional portion (10) and a second frictional portion (12) that are disposed on one principal surface (2d) of the piezoelectric element (3). The first frictional portion (10) is disposed at a position other than the antinodes of the piezoelectric element (3) at which a distance from one of the end surfaces (2a) is less than ⅓ L, where L represents a length in the longitudinal direction of the piezoelectric element (3). The second frictional portion (12) is disposed at a position other than the antinodes of the piezoelectric element (3) at which a distance from the other of the end surfaces (2b) is less than ⅓ L.
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