公开(公告)号：US20230280296A1

公开(公告)日：2023-09-07

申请号：US18176414

申请日：2023-02-28

Applicant: TDK CORPORATION

Inventor： Nishit GOEL ,  Stephen BART ,  Raitaro MASAOKA ,  Kazutaka FUJITA ,  Tomokazu ISHIKURA

IPC: G01N27/12

CPC classification number: G01N27/128

Abstract: A sensor including a micro-bridge structure, wherein the micro-bridge structure comprises a concave geometry, a first electrode on a surface of the micro-bridge structure, a second electrode on the surface of the micro-bridge structure, and a chemical sensing material coupled to the micro-bridge structure overlying the first electrode and the second electrode and exposed to an environment. The chemical sensing material overlays the first electrode and the second electrode and is within the concave geometry of the micro-bridge structure such that the chemical sensing material settles into the concave geometry of the micro-bridge structure during fabrication of the sensor, and wherein the chemical sensing material has an electrical resistance responsive to a concentration of gas in the environment.