MICRO-BRIDGE DESIGN OF A SENSOR DEVICE
    1.
    发明公开

    公开(公告)号:US20230280296A1

    公开(公告)日:2023-09-07

    申请号:US18176414

    申请日:2023-02-28

    CPC classification number: G01N27/128

    Abstract: A sensor including a micro-bridge structure, wherein the micro-bridge structure comprises a concave geometry, a first electrode on a surface of the micro-bridge structure, a second electrode on the surface of the micro-bridge structure, and a chemical sensing material coupled to the micro-bridge structure overlying the first electrode and the second electrode and exposed to an environment. The chemical sensing material overlays the first electrode and the second electrode and is within the concave geometry of the micro-bridge structure such that the chemical sensing material settles into the concave geometry of the micro-bridge structure during fabrication of the sensor, and wherein the chemical sensing material has an electrical resistance responsive to a concentration of gas in the environment.

    METAL OXIDE SEMICONDUCTOR GAS SENSOR
    3.
    发明公开

    公开(公告)号:US20240159700A1

    公开(公告)日:2024-05-16

    申请号:US17984758

    申请日:2022-11-10

    CPC classification number: G01N27/125

    Abstract: A metal oxide semiconductor gas sensor includes a first electrode, a second electrode, and a sensing layer in contact with the first electrode and the second electrode. The sensing layer includes SnO2 and WO3. A cross section of the sensing layer has an average porosity of 16.0% or more and 22.0% or less. SnO2 occupies 60 vol % or more and 80 vol % or less and WO3 occupies 20 vol % or more and 40 vol % or less in the sensing layer provided that pores are not counted as part of the sensing layer.

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