公开(公告)号：US20180005648A1

公开(公告)日：2018-01-04

申请号：US15197342

申请日：2016-06-29

Applicant: TDK CORPORATION

Inventor： Ken FUJII ,  Hisayoshi WATANABE ,  Masachika HASHINO ,  Takamitsu SAKAMOTO ,  Tetsuya HIRAKI

IPC: G11B5/127 ,  C23C16/455 ,  C23C16/04 ,  C23C16/40 ,  G11B5/39 ,  G11B5/11

CPC classification number: G11B5/1272 ,  G11B5/012 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

Abstract: This method of manufacturing a perpendicular magnetic recording head includes: forming a water-soluble resin film on a base; forming a first resist pattern having an opening on the water-soluble resin film; selectively dissolving the water-soluble resin film exposed at a bottom of the opening with a developer to expose a part of a surface of the base; forming a non-magnetic oxide film to cover the opening and the exposed part of the surface of the base; forming a second resist pattern to fill the opening covered with the non-magnetic oxide film and then removing the first resist pattern and the non-magnetic oxide film; forming a first side shield and a second side shield on the base to allow them to face each other with the second resist pattern therebetween; and forming a magnetic pole between the first and the second side shields after removal of the second resist pattern.