公开(公告)号：US20140268424A1

公开(公告)日：2014-09-18

申请号：US13845580

申请日：2013-03-18

Applicant: TDK Corporation

Inventor： Tatsuhiro NOJIMA ,  Ken FUJII

IPC: G11B5/39

CPC classification number: G11B5/3116 ,  G11B5/1871 ,  G11B5/3163 ,  G11B5/3903 ,  G11B5/3967 ,  Y10T29/49032 ,  Y10T29/49052

Abstract: Method for manufacturing a magnetic head includes providing a stopper layer on an upper surface of a main magnetic pole layer applying a magnetic flux to a recording medium via a first insulation layer, providing a second insulation layer on the upper surface of the first insulation layer to cover at least an entire surface of the stopper layer, covering an upper surface portion of the second insulation layer with a mask layer, forming a height difference portion by removing at least a first insulation layer portion not covered by the mask layer by etching to at least partially remove at least a stopper layer portion in a film thickness direction, and subsequently by removing the mask layer, forming a electrode film in the height difference portion, and forming a plating film, which is a magnetic shield for the main magnetic pole layer, on an upper surface of the electrode.

Abstract translation: 制造磁头的方法包括在主磁极层的上表面上设置阻挡层，该主磁极层通过第一绝缘层向记录介质施加磁通量，在第一绝缘层的上表面上提供第二绝缘层， 覆盖止挡层的至少整个表面，用掩模层覆盖第二绝缘层的上表面部分，通过蚀刻至少除去未被掩模层覆盖的第一绝缘层部分形成高度差部分 在膜厚方向上至少部分去除至少一个阻挡层部分，然后通过除去掩模层，在高差部分形成电极膜，并形成作为主磁极层的磁屏蔽的镀膜 ，在电极的上表面上。