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公开(公告)号:US20170154750A1
公开(公告)日:2017-06-01
申请号:US14785730
申请日:2015-01-09
Inventor: Takashi SATO
IPC: H01J37/065
CPC classification number: H01J37/065 , B22F3/1055 , B22F2003/1056 , B22F2003/1057 , B22F2999/00 , B33Y30/00 , H01J3/08 , H01J3/12 , H01J37/06 , H01J37/304 , H01J2237/06308 , H01J2237/0653 , Y02P10/295 , B22F2203/03 , B22F2202/06 , B22F2202/11
Abstract: When an emission current is changed, a decrease in brightness of an electron beam is prevented. An electron gun includes a cathode that emits thermoelectrons, a Wehnelt electrode that focuses the thermoelectrons, a control electrode that extracts the thermoelectrons from a distal end of said cathode, an anode that accelerates the thermoelectrons and irradiates a powder with the thermoelectrons as an electron beam, and an optimum condition collection controller that changes at least one of a bias voltage to be applied to the Wehnelt electrode and a control electrode voltage to be applied to the control electrode, and decides a combination of the bias voltage and the control electrode voltage at which the brightness of the electron beam reaches a peak.