公开(公告)号：US20170125202A1

公开(公告)日：2017-05-04

申请号：US15404440

申请日：2017-01-12

申请人： Hermes Microvision Inc.

发明人： Shuai Li

IPC分类号： H01J37/143 ,  H01J37/28

CPC分类号： H01J37/143 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/09 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/063 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/0653 ,  H01J2237/083 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/2806 ,  H01J2237/2817

摘要： This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

公开(公告)号：US09627172B2

公开(公告)日：2017-04-18

申请号：US14969306

申请日：2015-12-15

申请人： Carl Zeiss Microscopy, LLC

发明人： John A. Notte, IV ,  Weijie Huang ,  FHM-Faridur Rahman ,  Shawn McVey

IPC分类号： H01J37/08 ,  H01J37/18 ,  H01J27/26

CPC分类号： H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

摘要： The disclosure relates to a method of operating a gas field ion beam system in which the gas field ion beam system comprises an external housing, an internal housing, arranged within the external housing, an electrically conductive tip arranged within the internal housing, a gas supply for supplying one or more gases to the internal housing, the gas supply having a tube terminating within the internal housing, and an extractor electrode having a hole to permit ions generated in the neighborhood of the tip to pass through the hole into the external housing. The method comprises the step of regularly heating the external housing, the internal housing, the electrically conductive tip, the tube and the extractor electrode to a temperature of above 100° C.

公开(公告)号：US09530612B2

公开(公告)日：2016-12-27

申请号：US14314222

申请日：2014-06-25

申请人： Carl Zeiss Microscopy, LLC

发明人： John A. Notte, IV ,  Mark D. DiManna ,  Raymond Hill ,  Robert Conners ,  Alexander Groholski

IPC分类号： H01J37/07 ,  H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08

CPC分类号： H01J37/18 ,  G21K5/04 ,  H01J27/26 ,  H01J37/08 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/032 ,  H01J2237/0653 ,  H01J2237/0807 ,  H01J2237/1501 ,  H01J2237/1502 ,  H01J2237/1825 ,  H01J2237/188 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20221 ,  H01J2237/20235

摘要： The present disclosure relates to a charged particle beam system comprising a charged particle beam source, a charged particle column, a sample chamber, a plurality of electrically powered devices arranged within or at either one of the charged particle column, the charged particle beam source and the sample chamber, and at least one first converter to convert an electrical AC voltage power into an electrical DC voltage. The first converter is positioned at a distance from either of the charged particle beam source, the charged particle column and the charged particle chamber, and all elements of the plurality of electrically powered devices, when operated during operation of the charged particle beam source, are configured to be exclusively powered by the DC voltage provided by the converter.

摘要翻译： 本发明涉及一种带电粒子束系统，其包括带电粒子束源，带电粒子柱，样品室，布置在带电粒子柱中的任一个中的多个电动设备，带电粒子束源和 样品室和至少一个第一转换器，以将电AC电压功率转换成电DC电压。 第一转换器位于与带电粒子束源，带电粒子柱和带电粒子室中的任一个相距一定距离处，并且当在带电粒子束源的操作期间操作时，多个电动装置的所有元件是 配置为由转换器提供的直流电压专门供电。

公开(公告)号：US08674300B2

公开(公告)日：2014-03-18

申请号：US12910502

申请日：2010-10-22

申请人： Pavel Adamec

发明人： Pavel Adamec

IPC分类号： H05B37/02

CPC分类号： H01J37/073 ,  H01J2237/022 ,  H01J2237/0653 ,  H01J2237/2485

摘要： A method and a device for stabilizing the emission current of an emitter of a charged particle beam device are provided. In the method, the emitter is operated under predetermined operation parameters including at least one voltage with a predetermined value. The method includes determining a first value of the emission current under the predetermined operation parameters and flash cleaning the emitter while a first electric field is applied to the emitter. The first electric field is generated by the at least one voltage having a first value of the at least one voltage, wherein the first value of the at least one voltage is provided in dependence of the determined first value of the emission current.

摘要翻译： 提供一种用于稳定带电粒子束装置的发射极的发射电流的方法和装置。 在该方法中，发射器在包括至少一个具有预定值的电压的预定操作参数下运行。 该方法包括在预定操作参数下确定发射电流的第一值，并且在向发射器施加第一电场时闪光清洁发射器。 第一电场由具有至少一个电压的第一值的至少一个电压产生，其中根据确定的发射电流的第一值提供至少一个电压的第一值。

公开(公告)号：US08530867B1

公开(公告)日：2013-09-10

申请号：US13457897

申请日：2012-04-27

申请人： Mehran Nasser-Ghodsi

发明人： Mehran Nasser-Ghodsi

IPC分类号： H01J37/073

CPC分类号： H01J37/073 ,  H01J37/265 ,  H01J2237/022 ,  H01J2237/06341 ,  H01J2237/0653

摘要： Contamination may be removed from a field emitter unit during operation of the emitter unit in an environment at a pressure that lies within a range between 10−6 torr and 10−8 torr. At regular predetermined intervals an electron beam from an emitter tip may be deflected away from a path through a beam defining aperture and onto an electron collector. An electron beam current to the electron collector may be determined and the emitter unit may be flash heated if the current to the electron collector is below a threshold. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

摘要翻译： 在位于10-6托和10-8托之间的压力的环境中，在发射器单元操作期间，可以从场发射器单元去除污染物。 以规则的预定间隔，来自发射极尖端的电子束可以偏离通过光束限定孔径并且到电子收集器的路径。 可以确定到电子收集器的电子束电流，并且如果到电子收集器的电流低于阈值，则发射器单元可以被闪光加热。 要强调的是，该摘要被提供以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US20130200788A1

公开(公告)日：2013-08-08

申请号：US13577998

申请日：2011-01-19

申请人： Boklae Cho ,  Shigeru Kokubo ,  Hisaya Murakoshi ,  Hisao Nitta

发明人： Boklae Cho ,  Shigeru Kokubo ,  Hisaya Murakoshi ,  Hisao Nitta

IPC分类号： H01J29/98

CPC分类号： H01J29/98 ,  H01J37/073 ,  H01J2237/022 ,  H01J2237/0653 ,  H01J2237/1825

摘要： The disclosed charged particle beam apparatus includes a field-emission electron source including single crystal of tungsten; a vacuum chamber having the electron source therein; an exhausting system for exhausting the vacuum chamber; a filament connected to the electron source to let flow a current through the electron source and thereby heat the electron source; a power supply for letting a current flow through the filament; an ammeter for measuring a total current emitted from the electron source; and a controlling unit for exercising control to cause the power supply to let a current flow through the filament when the total current measured periodically has become a predetermined ratio or less as compared with a total current from the electron source found immediately after first electron beam emission, or a total current from the electron beam found immediately after a current is let flow through the filament.

摘要翻译： 所公开的带电粒子束装置包括：场致发射电子源，其包括钨的单晶; 其中具有电子源的真空室; 用于排出真空室的排气系统; 连接到电子源的灯丝，使电流流过电子源，从而加热电子源; 用于使电流流过灯丝的电源; 用于测量从电子源发射的总电流的电流表; 以及控制单元，用于当与在第一电子束发射之后立即发现的电子源的总电流相比，当周期性测量的总电流已经变为预定比率或更小时，进行控制以使电源使电流流过灯丝 ，或者在电流流过灯丝之后立即发现来自电子束的总电流。

公开(公告)号：US20060138353A1

公开(公告)日：2006-06-29

申请号：US11023467

申请日：2004-12-29

申请人： Yuichiro Sasaki ,  Bunji Mizuno

发明人： Yuichiro Sasaki ,  Bunji Mizuno

IPC分类号： H01J37/317

CPC分类号： H01J37/3171 ,  H01J37/08 ,  H01J37/304 ,  H01J2237/024 ,  H01J2237/0455 ,  H01J2237/0653 ,  H01J2237/08 ,  H01J2237/24535 ,  H01J2237/30472 ,  H01J2237/31703

摘要： An ion-implanting apparatus and method that can dynamically control a beam current value with time and does not change energy. This ion-implanting apparatus controls a dynamic change in beam current value with time by giving feedback on the beam current value measured with a beam current measuring means.

摘要翻译： 一种离子注入装置和方法，其可以随时间动态地控制束电流值，并且不改变能量。 该离子注入装置通过对用束电流测量装置测量的束电流值进行反馈来控制束电流值随时间的动态变化。

公开(公告)号：US20190057833A1

公开(公告)日：2019-02-21

申请号：US16042871

申请日：2018-07-23

申请人： Hermes Microvision, Inc.

发明人： Shuai LI

IPC分类号： H01J37/143 ,  H01J37/28 ,  H01J37/09 ,  H01J3/20 ,  H01J37/065 ,  H01J37/14 ,  H01J37/063

CPC分类号： H01J37/143 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/09 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/063 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/0653 ,  H01J2237/083 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/2806 ,  H01J2237/2817

摘要： This invention provides a charged particle source, which comprises an emitter and means fo generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

公开(公告)号：US09812283B2

公开(公告)日：2017-11-07

申请号：US15404440

申请日：2017-01-12

申请人： Hermes Microvision Inc.

发明人： Shuai Li

IPC分类号： H01J37/143 ,  H01J37/28 ,  H01J3/20 ,  H01J37/09

CPC分类号： H01J37/143 ,  H01J3/20 ,  H01J37/063 ,  H01J37/065 ,  H01J37/09 ,  H01J37/14 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/063 ,  H01J2237/06308 ,  H01J2237/06375 ,  H01J2237/0653 ,  H01J2237/083 ,  H01J2237/141 ,  H01J2237/1415 ,  H01J2237/2806 ,  H01J2237/2817

摘要： This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

公开(公告)号：US20170154750A1

公开(公告)日：2017-06-01

申请号：US14785730

申请日：2015-01-09

申请人： TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING

发明人： Takashi SATO

IPC分类号： H01J37/065

CPC分类号： H01J37/065 ,  B22F3/1055 ,  B22F2003/1056 ,  B22F2003/1057 ,  B22F2999/00 ,  B33Y30/00 ,  H01J3/08 ,  H01J3/12 ,  H01J37/06 ,  H01J37/304 ,  H01J2237/06308 ,  H01J2237/0653 ,  Y02P10/295 ,  B22F2203/03 ,  B22F2202/06 ,  B22F2202/11

摘要： When an emission current is changed, a decrease in brightness of an electron beam is prevented. An electron gun includes a cathode that emits thermoelectrons, a Wehnelt electrode that focuses the thermoelectrons, a control electrode that extracts the thermoelectrons from a distal end of said cathode, an anode that accelerates the thermoelectrons and irradiates a powder with the thermoelectrons as an electron beam, and an optimum condition collection controller that changes at least one of a bias voltage to be applied to the Wehnelt electrode and a control electrode voltage to be applied to the control electrode, and decides a combination of the bias voltage and the control electrode voltage at which the brightness of the electron beam reaches a peak.