公开(公告)号：US3809899A

公开(公告)日：1974-05-07

申请号：US28137572

申请日：1972-08-17

申请人： TEKTRONIX INC

发明人： BAKER T ,  BALSIGER M ,  CONSIDINE K ,  LITSJO H

IPC分类号： H01J37/06 ,  H01J37/067 ,  H01J37/073 ,  H01J37/09 ,  H01J37/16 ,  H01J37/18 ,  H01J37/26

CPC分类号： H01J37/073 ,  H01J37/09 ,  H01J2237/06316

摘要： An electron-beam tube for a scanning electron microscope employs the use of a TF built-up field emission cathode which can be operated from preferably the 100 plane in a substantially continuous mode to provide a stable electron beam having high current density, high resolution, and very high electron optical brightness from a source of very small proportions. The tube, which comprises an evacuated envelope having chambers of different vacuums, is designed to facilitate either quick-change cathode replacement or attendance to the specimen with minimum loss of operating time since the vacuum of the entire tube need not be released. Also, the chamber containing the field emission cathode can be separable from the tube to allow replacement by a new preprocessed cathode in a pre-evacuated chamber. In this case, the mounting means includes a device for puncturing a seal in the cathode chamber to allow the electron beam to pass therethrough.

摘要翻译： 用于扫描电子显微镜的电子束管采用使用TF组合场致发射阴极，其能够以基本上连续的模式从优选的100平面操作，以提供具有高电流密度，高分辨率的稳定电子束， 和非常高的电子光学亮度来自非常小比例的来源。 包括具有不同真空腔室的真空外壳的管子被设计成便于快速更换阴极更换或者以最小的操作时间损失对试样的出现，因为整个管的真空度不需要被释放。 此外，包含场发射阴极的室可以与管分离，以允许在预抽真空室中由新的预处理阴极替换。 在这种情况下，安装装置包括用于刺穿阴极室中的密封以允许电子束通过的装置。