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44 条记录 (耗时 0.013 秒)

    Charged particle beam generating apparatus, charged particle beam apparatus, high voltage generating apparatus, and high potential apparatus
    2.
    发明授权
    Charged particle beam generating apparatus, charged particle beam apparatus, high voltage generating apparatus, and high potential apparatus 有权
    带电粒子束产生装置，带电粒子束装置，高压发生装置和高电位装置

    公开(公告)号：US09548182B2

    公开(公告)日：2017-01-17

    申请号：US14406909

    申请日：2013-05-08

    申请人： HITACHI HIGH-TECHNOLOGIES CORPORATION

    发明人： Takashi Onishi ,  Shunichi Watanabe ,  Minoru Kaneda

    IPC分类号： H01J37/04 ,  H01J37/073 ,  H01J37/02 ,  H01J37/067 ,  H01J37/248 ,  H01J37/24 ,  H01J27/02 ,  H01J29/48 ,  H01J37/16

    CPC分类号： H01J37/04 ,  H01J27/024 ,  H01J29/485 ,  H01J37/026 ,  H01J37/067 ,  H01J37/073 ,  H01J37/16 ,  H01J37/241 ,  H01J37/248 ,  H01J2237/16

    摘要： An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.

    摘要翻译： 根据本发明的产生带电粒子束的仪器具有：带电粒子源; 多个第一电极，其沿带电粒子源的带电粒子的照射方向设置; 设置在所述第一电极之间的多个绝缘构件; 以及围绕所述多个第一电极安装的壳体。 壳体由绝缘固体材料形成，并且包括设置在靠近多个第一电极的位置处的多个第二电极。 所述多个第二电极中的至少一个电连接到所述多个第一电极中的至少一个，所述多个第二电极中的每一个具有与所述第一电极中的所述第一电极的电位相同的电位。

    Electron beam generator for an electron beam gun
    3.
    发明授权
    Electron beam generator for an electron beam gun 失效
    用于电子束枪的电子束发生器

    公开(公告)号：US5089686A

    公开(公告)日：1992-02-18

    申请号：US579794

    申请日：1990-09-10

    申请人： Dieter Fritz

    发明人： Dieter Fritz

    IPC分类号： H01J3/02 ,  H01J37/067

    CPC分类号： H01J3/028 ,  H01J37/067

    摘要： In the electron beam generator the cathode (3) the control electrode (4) and the anode (5) are provided with easily replaceable parts (12, 13, 14, 28, 29) so as to be able, by exchanging the parts, to optimize the electron beam generator in a simple manner for a selected power range within the working range of the electron beam gun.

    摘要翻译： 在电子束发生器中，阴极（3），控制电极（4）和阳极（5）设置有易于更换的部件（12,13,14,28,29），以便能够通过更换部件， 以电子束枪的工作范围内的选择的功率范围以简单的方式优化电子束发生器。

    Scanning tunneling microscope
    4.
    发明授权
    Scanning tunneling microscope 失效
    扫描隧道显微镜

    公开(公告)号：US4992660A

    公开(公告)日：1991-02-12

    申请号：US543449

    申请日：1990-06-25

    申请人： Hideo Kobayashi

    发明人： Hideo Kobayashi

    IPC分类号： G01Q10/00 ,  G01Q60/16 ,  G01Q70/02 ,  H01J37/067 ,  H01J37/28

    CPC分类号： G01Q60/16 ,  G01Q70/02 ,  Y10S977/873

    摘要： A scanning tunneling microscope using a tip which can be easily replaced. The microscope includes a piezoelectric drive mechanism for driving the tip, a tip holder to which the tip is attached, and a sample holder. The tip holder can be detachably mounted to the piezoelectric drive mechanism. The Z-axis of a coordinate system extends through the tip holder and across the sample surface during observation. A replacement rod for replacng the tip holder is mounted so as to be movable along the Z-axis.

    摘要翻译： 扫描隧道显微镜使用可以方便更换的尖端。 显微镜包括用于驱动尖端的压电驱动机构，附接有尖端的尖端保持器和样品架。 刀头保持器可拆卸地安装在压电驱动机构上。 坐标系的Z轴在观察期间延伸穿过尖端保持器并穿过样品表面。 用于替换刀片保持器的替换杆被安装成可以沿着Z轴移动。

    Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
    6.
    发明授权
    Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope 失效
    电子束管，包括用于扫描电子显微镜的半导体场发射阴极

    公开(公告)号：US3809899A

    公开(公告)日：1974-05-07

    申请号：US28137572

    申请日：1972-08-17

    申请人： TEKTRONIX INC

    发明人： BAKER T ,  BALSIGER M ,  CONSIDINE K ,  LITSJO H

    IPC分类号： H01J37/06 ,  H01J37/067 ,  H01J37/073 ,  H01J37/09 ,  H01J37/16 ,  H01J37/18 ,  H01J37/26

    CPC分类号： H01J37/073 ,  H01J37/09 ,  H01J2237/06316

    摘要： An electron-beam tube for a scanning electron microscope employs the use of a TF built-up field emission cathode which can be operated from preferably the 100 plane in a substantially continuous mode to provide a stable electron beam having high current density, high resolution, and very high electron optical brightness from a source of very small proportions. The tube, which comprises an evacuated envelope having chambers of different vacuums, is designed to facilitate either quick-change cathode replacement or attendance to the specimen with minimum loss of operating time since the vacuum of the entire tube need not be released. Also, the chamber containing the field emission cathode can be separable from the tube to allow replacement by a new preprocessed cathode in a pre-evacuated chamber. In this case, the mounting means includes a device for puncturing a seal in the cathode chamber to allow the electron beam to pass therethrough.

    摘要翻译： 用于扫描电子显微镜的电子束管采用使用TF组合场致发射阴极，其能够以基本上连续的模式从优选的100平面操作，以提供具有高电流密度，高分辨率的稳定电子束， 和非常高的电子光学亮度来自非常小比例的来源。 包括具有不同真空腔室的真空外壳的管子被设计成便于快速更换阴极更换或者以最小的操作时间损失对试样的出现，因为整个管的真空度不需要被释放。 此外，包含场发射阴极的室可以与管分离，以允许在预抽真空室中由新的预处理阴极替换。 在这种情况下，安装装置包括用于刺穿阴极室中的密封以允许电子束通过的装置。

    MEMS BASED CHARGED PARTICLE DEFLECTOR DESIGN
    9.
    发明申请
    MEMS BASED CHARGED PARTICLE DEFLECTOR DESIGN 失效
    基于MEMS的充电颗粒偏转器设计

    公开(公告)号：US20050199822A1

    公开(公告)日：2005-09-15

    申请号：US10987871

    申请日：2004-11-12

    申请人： Rahul Saini ,  Zoran Jandric ,  David Tuggle

    发明人： Rahul Saini ,  Zoran Jandric ,  David Tuggle

    IPC分类号： G01K1/08 ,  H01J3/14 ,  H01J3/26 ,  H01J37/04 ,  H01J37/067 ,  H01L21/44 ,  H05K1/00

    CPC分类号： H01J37/04 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/28 ,  H01J37/3177 ,  H01J2237/03 ,  H01J2237/0492 ,  H01J2237/1205

    摘要： A microcolumn including a plurality of beam modification components coupled to an assembly substrate, wherein the plurality of beam modification components includes: (1) an extractor component; (2) a first focusing electrode component; (3) a first anode component; (4) a first deflector component; (5) a second focusing electrode component; (6) a second deflector component; (7) a third focusing electrode component; (8) a third deflector component; (9) a second anode component; (10) a fourth focusing electrode component; and (11) a third anode component. The beam modification components may be ordered on the substrate in this sequence or other sequences.

    摘要翻译： 一种微柱，包括耦合到组件衬底的多个光束修改部件，其中所述多个光束修改部件包括：（1）提取器部件; （2）第一聚焦电极组件; （3）第一阳极部件; （4）第一偏转器部件; （5）第二聚焦电极部件; （6）第二偏转器部件; （7）第三聚焦电极部件; （8）第三偏转器部件; （9）第二阳极部件; （10）第四聚焦电极组件; 和（11）第三阳极组件。 束修饰组分可以按照该顺序或其它序列在衬底上排列。

    Electron gun having electrically isolated and adjustable cathode
    10.
    发明授权
    Electron gun having electrically isolated and adjustable cathode 失效
    电子枪具有电气隔离和可调节的阴极

    公开(公告)号：US5686785A

    公开(公告)日：1997-11-11

    申请号：US503991

    申请日：1995-07-19

    申请人： Boris A. Movchan ,  Viktor A. Timashov ,  Evgenii L. Pijuk

    发明人： Boris A. Movchan ,  Viktor A. Timashov ,  Evgenii L. Pijuk

    IPC分类号： H01J37/065 ,  H01J37/067 ,  H01J29/46

    CPC分类号： H01J37/067 ,  H01J37/065 ,  H01J2237/06308

    摘要： An electron gun for producing a beam of electrons has an elongated, linear thermionic cathode and a focusing electrode. The opposite ends of the cathode are engaged by adjustable holders which enable the spatial separation between the cathode and focusing electrode to be easily varied. The focusing electrode is electrically isolated from the cathode whereby fine tuning of the electron beam may be accomplished by varying the potential difference between the focusing electrode and cathode.

    摘要翻译： 用于产生电子束的电子枪具有细长的线性热离子阴极和聚焦电极。 阴极的相对端由可调节的保持器接合，这使得阴极和聚焦电极之间的空间分离容易变化。 聚焦电极与阴极电隔离，由此可以通过改变聚焦电极和阴极之间的电位差来实现电子束的微调。