公开(公告)号：US10410827B2

公开(公告)日：2019-09-10

申请号：US15586194

申请日：2017-05-03

Applicant: FEI Company

Inventor： Ali Mohammadi-Gheidari ,  Alexander Henstra ,  Peter Christiaan Tiemeijer ,  Kun Liu ,  Pleun Dona ,  Gregory A. Schwind ,  Gerbert Jeroen van de Water

IPC: H01J37/29 ,  H01J37/065 ,  H01J37/067 ,  H01J37/145 ,  G02B21/06 ,  H01J37/244

Abstract: A charged particle microscope and a method of operating a charged particle microscope are disclosed. The microscope employs a source for producing charged particles, and a source lens below the source to form a charged particle beam which is directed onto a specimen by a condenser system. A detector collects radiation emanating from the specimen in response to irradiation of the specimen by the beam. The source lens is a compound lens, focusing the beam within a vacuum enclosure using both a magnetic lens having permanent magnets outside the enclosure to produce a magnetic field at the beam, and a variable electrostatic lens within the enclosure.

公开(公告)号：US09548182B2

公开(公告)日：2017-01-17

申请号：US14406909

申请日：2013-05-08

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Takashi Onishi ,  Shunichi Watanabe ,  Minoru Kaneda

IPC: H01J37/04 ,  H01J37/073 ,  H01J37/02 ,  H01J37/067 ,  H01J37/248 ,  H01J37/24 ,  H01J27/02 ,  H01J29/48 ,  H01J37/16

CPC classification number: H01J37/04 ,  H01J27/024 ,  H01J29/485 ,  H01J37/026 ,  H01J37/067 ,  H01J37/073 ,  H01J37/16 ,  H01J37/241 ,  H01J37/248 ,  H01J2237/16

Abstract: An instrument producing a charged particle beam according to the present invention is provided with: a charged particle source; a plurality of first electrodes disposed along a direction of irradiation of charged particles from the charged particle source; a plurality of insulation members disposed between the first electrodes; and a housing mounted around the plurality of first electrodes. The housing is formed from an insulating solid material, and includes a plurality of second electrodes disposed at positions in proximity to the plurality of first electrodes. At least one of the plurality of second electrodes is electrically connected to at least one of the plurality of first electrodes, each of the plurality of second electrodes having the same potential as the potential of the proximate one of the first electrodes.

Abstract translation: 根据本发明的产生带电粒子束的仪器具有：带电粒子源; 多个第一电极，其沿带电粒子源的带电粒子的照射方向设置; 设置在所述第一电极之间的多个绝缘构件; 以及围绕所述多个第一电极安装的壳体。 壳体由绝缘固体材料形成，并且包括设置在靠近多个第一电极的位置处的多个第二电极。 所述多个第二电极中的至少一个电连接到所述多个第一电极中的至少一个，所述多个第二电极中的每一个具有与所述第一电极中的所述第一电极的电位相同的电位。

公开(公告)号：US5089686A

公开(公告)日：1992-02-18

申请号：US579794

申请日：1990-09-10

Applicant: Dieter Fritz

Inventor： Dieter Fritz

IPC: H01J3/02 ,  H01J37/067

CPC classification number: H01J3/028 ,  H01J37/067

Abstract: In the electron beam generator the cathode (3) the control electrode (4) and the anode (5) are provided with easily replaceable parts (12, 13, 14, 28, 29) so as to be able, by exchanging the parts, to optimize the electron beam generator in a simple manner for a selected power range within the working range of the electron beam gun.

Abstract translation: 在电子束发生器中，阴极（3），控制电极（4）和阳极（5）设置有易于更换的部件（12,13,14,28,29），以便能够通过更换部件， 以电子束枪的工作范围内的选择的功率范围以简单的方式优化电子束发生器。

公开(公告)号：US4992660A

公开(公告)日：1991-02-12

申请号：US543449

申请日：1990-06-25

Applicant: Hideo Kobayashi

Inventor： Hideo Kobayashi

IPC: G01Q10/00 ,  G01Q60/16 ,  G01Q70/02 ,  H01J37/067 ,  H01J37/28

CPC classification number: G01Q60/16 ,  G01Q70/02 ,  Y10S977/873

Abstract: A scanning tunneling microscope using a tip which can be easily replaced. The microscope includes a piezoelectric drive mechanism for driving the tip, a tip holder to which the tip is attached, and a sample holder. The tip holder can be detachably mounted to the piezoelectric drive mechanism. The Z-axis of a coordinate system extends through the tip holder and across the sample surface during observation. A replacement rod for replacng the tip holder is mounted so as to be movable along the Z-axis.

Abstract translation: 扫描隧道显微镜使用可以方便更换的尖端。 显微镜包括用于驱动尖端的压电驱动机构，附接有尖端的尖端保持器和样品架。 刀头保持器可拆卸地安装在压电驱动机构上。 坐标系的Z轴在观察期间延伸穿过尖端保持器并穿过样品表面。 用于替换刀片保持器的替换杆被安装成可以沿着Z轴移动。

公开(公告)号：US4496881A

公开(公告)日：1985-01-29

申请号：US427862

申请日：1982-09-29

Applicant: Richard N. Cheever

Inventor： Richard N. Cheever

IPC: H01J37/06 ,  A23L3/32 ,  A61L2/08 ,  G21K1/00 ,  G21K5/04 ,  H01J3/02 ,  H01J37/30 ,  H01J37/067 ,  H01J1/30

CPC classification number: H01J3/021

Abstract: This disclosure is concerned with automatically replenishable cold cathode structures and the like wherein the monitoring of a predetermined variation in electron beam performance caused by erosion of the cathode material generates control signals for advancing reserve cathode material into operative position.

Abstract translation: 本公开涉及自动补充的冷阴极结构等，其中监测由阴极材料的侵蚀引起的电子束性能的预定变化产生用于将储备阴极材料推进到操作位置的控制信号。

公开(公告)号：US3809899A

公开(公告)日：1974-05-07

申请号：US28137572

申请日：1972-08-17

Applicant: TEKTRONIX INC

Inventor： BAKER T ,  BALSIGER M ,  CONSIDINE K ,  LITSJO H

IPC: H01J37/06 ,  H01J37/067 ,  H01J37/073 ,  H01J37/09 ,  H01J37/16 ,  H01J37/18 ,  H01J37/26

CPC classification number: H01J37/073 ,  H01J37/09 ,  H01J2237/06316

Abstract: An electron-beam tube for a scanning electron microscope employs the use of a TF built-up field emission cathode which can be operated from preferably the 100 plane in a substantially continuous mode to provide a stable electron beam having high current density, high resolution, and very high electron optical brightness from a source of very small proportions. The tube, which comprises an evacuated envelope having chambers of different vacuums, is designed to facilitate either quick-change cathode replacement or attendance to the specimen with minimum loss of operating time since the vacuum of the entire tube need not be released. Also, the chamber containing the field emission cathode can be separable from the tube to allow replacement by a new preprocessed cathode in a pre-evacuated chamber. In this case, the mounting means includes a device for puncturing a seal in the cathode chamber to allow the electron beam to pass therethrough.

Abstract translation: 用于扫描电子显微镜的电子束管采用使用TF组合场致发射阴极，其能够以基本上连续的模式从优选的100平面操作，以提供具有高电流密度，高分辨率的稳定电子束， 和非常高的电子光学亮度来自非常小比例的来源。 包括具有不同真空腔室的真空外壳的管子被设计成便于快速更换阴极更换或者以最小的操作时间损失对试样的出现，因为整个管的真空度不需要被释放。 此外，包含场发射阴极的室可以与管分离，以允许在预抽真空室中由新的预处理阴极替换。 在这种情况下，安装装置包括用于刺穿阴极室中的密封以允许电子束通过的装置。

公开(公告)号：US3636346A

公开(公告)日：1972-01-18

申请号：US3636346D

申请日：1970-03-16

Applicant: HITACHI LTD

Inventor： AKAHORI HIROSHI ,  OHNUMA YOSHIRO ,  KUBOZOE MORIOKI

IPC: G01Q30/16 ,  H01J37/067 ,  H01J37/07 ,  H01J37/26

CPC classification number: H01J37/067 ,  H01J37/07

Abstract: An electron beam generator for electron microscopes or the like apparatus comprising an electron gun, an anode placed in a position opposite to the electron gun, and an electron gun chamber containing therein the electron gun and the anode, wherein either an electrical insulation layer is formed on the inner surface of the electron gun chamber or a cylinder of an electrically insulating material is provided to enclose the electron gun and the anode.

公开(公告)号：US3182175A

公开(公告)日：1965-05-04

申请号：US22576562

申请日：1962-09-24

Applicant: NAT RES CORP

Inventor： SIBLEY CLIFTON B

IPC: H01J37/067

CPC classification number: H01J37/067

公开(公告)号：US20190074156A1

公开(公告)日：2019-03-07

申请号：US15834152

申请日：2017-12-07

Applicant: NATIONAL CENTER FOR NANOSCIENCE AND TECHNOLOGY, CHINA

Inventor： Xixue HU ,  Hongbo GUO ,  Dongliang WANG ,  Yaling GAN ,  Xiaohui XU

IPC: H01J37/067 ,  G06T7/73

Abstract: Disclosed are a filament positioning system and a filament positioning method. The filament positioning system includes a bottom plate, a first positioning regulating mechanism and a second positioning regulating mechanism, wherein the first positioning regulating mechanism is configured to conduct positioning regulation of a position of a filament seat on the bottom plate, so that filament seats of different models can be fixed to the bottom plate, and the second positioning regulating mechanism is configured to conduct positioning regulation on the filament; and a detection module configured to collect and display position information of a filament tip and the filament seat, wherein the first positioning regulating mechanism and the second positioning regulating mechanism correspondingly regulate positions of the filament seat and the filament tip according to the position information.

公开(公告)号：US09508521B2

公开(公告)日：2016-11-29

申请号：US14328754

申请日：2014-07-11

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Norihide Saho ,  Masahiro Yamaoka ,  Noriaki Arai

IPC: H01J27/00 ,  H01J27/02 ,  H01J27/26 ,  H01J37/02 ,  H01J37/067 ,  H01J37/08 ,  H01J37/28 ,  H01J37/26

CPC classification number: H01J27/26 ,  H01J27/022 ,  H01J37/023 ,  H01J37/067 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/006 ,  H01J2237/061 ,  H01J2237/0807 ,  H01J2237/2803

Abstract: An ion beam device according to the present invention includes a gas field ion source (1) including an emitter tip (21) supported by an emitter base mount (64), a ionization chamber (15) including an extraction electrode (24) and being configured to surround the emitter tip (21), and a gas supply tube (25). A center axis line of the extraction electrode (24) overlaps or is parallel to a center axis line (14A) of the ion irradiation light system, and a center axis line (66) passing the emitter tip (21) and the emitter base mount (64) is inclinable with respect to a center axis line of the ionization chamber (15). Accordingly, an ion beam device including a gas field ion source capable of adjusting the direction of the emitter tip is provided.

Abstract translation: 根据本发明的离子束装置包括气体离子源（1），其包括由发射极基座（64）支撑的发射极尖端（21），包括引出电极（24）的电离室（15） 构造成围绕发射器尖端（21），以及气体供应管（25）。 引出电极（24）的中心轴线与离​​子照射光系统的中心轴线（14A）重叠或平行，通过发射极尖端（21）和发射极基座 （64）相对于所述电离室（15）的中心轴线是可倾斜的。 因此，提供了包括能够调节发射极尖端的方向的气体场离子源的离子束装置。