公开(公告)号：US20170338078A1

公开(公告)日：2017-11-23

申请号：US15601547

申请日：2017-05-22

Applicant: TESCAN Brno, s.r.o.

Inventor： Jaroslav Jiruse ,  Filip Lopour ,  Milos Havelka ,  Jan Polster ,  Josef Rysavka ,  Martin Zadrazil

IPC: H01J37/26 ,  H01J37/147 ,  H01J37/141 ,  H01J37/28 ,  H01J37/12

CPC classification number: H01J37/263 ,  H01J37/04 ,  H01J37/12 ,  H01J37/141 ,  H01J37/1475 ,  H01J37/28 ,  H01J2237/04922

Abstract: A scanning electron microscope comprises three objective lenses, including a distant objective lens and a close objective lens, which are of conventional type, and an immersion objective lens of the immersion type below the distant objective lens and the close objective lens. These three objective lenses can be controlled independently, therefor different combinations of active objective lenses can be achieved. The scanning electron microscope therefore offers various imaging modes. There is a possibility to switch between these imaging modes and therefore, choose the most suitable way of imaging for given application.