Patent search ap:("TEXAS INSTRUMENTS INC") AND inv:"SHERER JIMMIE B" Page 1

1.

发明授权
Vapor deposition apparatus including orbital substrate support 失效
Title translation: 蒸气沉积装置，包括基板支撑

公开(公告)号：US3456616A

公开(公告)日：1969-07-22

申请号：US3456616D

申请日：1968-05-08

Applicant: TEXAS INSTRUMENTS INC

Inventor： GLEIM PAUL S , SHERER JIMMIE B

IPC: C23C14/34 , C23C16/00 , C23C13/04 , C23C13/12

CPC classification number: C23C14/34 , C23C16/00

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