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公开(公告)号：US20190127212A1
公开(公告)日：2019-05-02
申请号：US15799808
申请日：2017-10-31
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Simon Joshua JACOBS , Molly Nelis SING , Lawrence Tucker LATHAM
Abstract: In described examples, a MEMS device component includes a passivation layer formed from a vapor and/or a liquid compound that may include precursors. The compound may contain amino acid, antioxidants, nitriles or other compounds, and may be disposed on a surface of the MEMS device component and/or a package or package portion thereof. If the compound is a precursor, it may be treated to cause formation of the passivation layer from the precursor.
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