公开(公告)号：US11094644B2

公开(公告)日：2021-08-17

申请号：US16679997

申请日：2019-11-11

Applicant: TEXAS INSTRUMENTS INCORPORATED

Inventor： Adrian Salinas ,  William Keith McDonald ,  Scott Alexander Johannesmeyer ,  Robert Paul Luckin ,  Stephen Arlon Meisner

IPC: G03F7/20 ,  H01L21/027 ,  H01L23/544

Abstract: In examples, a method of manufacturing an integrated circuit comprises locating a photomask between a light source and a semiconductor wafer having a photoresist layer in a wafer scribe lane of the wafer, wherein the photomask comprises: a first mask scribe lane pattern; a second mask scribe lane pattern matching the first mask scribe lane pattern; and at least one circuit pattern of the integrated circuit located between the first and second mask scribe lane patterns. The method further includes illuminating the photomask to produce in the photoresist layer of the wafer scribe lane a first exposed portion corresponding to the second mask scribe lane pattern; locating the first mask scribe lane pattern between the light source and the first exposed portion; and illuminating the photomask, wherein the first mask scribe lane pattern substantially shields non-exposed portions of the photoresist layer of the wafer scribe lane from light exposure.