公开(公告)号：US20150171308A1

公开(公告)日：2015-06-18

申请号：US14572558

申请日：2014-12-16

Applicant: THALES ,  CEDRAT TECHNOLOGIES

Inventor： Christophe DEVILLIERS ,  Félix AGUILAR ,  Julien DUCARNE ,  Francois BARILLOT ,  Frank CLAEYSSEN

IPC: H01L41/09 ,  H01L41/12

CPC classification number: H01L41/0986 ,  H01L41/12 ,  H02N2/02 ,  H02N2/06

Abstract: A nanometer-scale precision actuator comprises a base, an intermediate structure, an output interface, and two linear elements producing a controllable extension in the same longitudinal direction, each between a first and a second end. A first of the two elements has a first end fixed onto the intermediate structure and a second end fixed onto the base, a second of the two elements has a first end fixed onto the intermediate structure and a second end fixed to the output interface. The base and the intermediate structure are positioned in such a manner that the controllable extension of the second element produces a displacement of the actuator in a first direction and the controllable extension of the first element produces a displacement of the actuator in a second direction, opposite to the first direction, with respect to the base.

Abstract translation: 纳米级精密致动器包括基座，中间结构，输出接口以及在相同纵向方向上产生可控延伸的两个线性元件，每一个在第一和第二端之间。 两个元件中的第一个具有固定到中间结构上的第一端和固定到基座上的第二端，两个元件中的第二端具有固定到中间结构上的第一端和固定到输出界面的第二端。 基座和中间结构以这样的方式定位，使得第二元件的可控延伸部在第一方向上产生致动器的位移，并且第一元件的可控延伸部在第二方向产生致动器的位移， 到第一个方向，相对于基地。