公开(公告)号：US20200098577A1

公开(公告)日：2020-03-26

申请号：US16583101

申请日：2019-09-25

申请人： The Regents of the University of California

发明人： Xiaobin Xu ,  Qing Yang ,  Natcha Wattanatorn ,  Chuanzhen Zhao ,  Logan A. Stewart ,  Steven J. Jonas ,  Paul S. Weiss

IPC分类号： H01L21/308 ,  H01L21/3065

摘要： A robust and general fabrication/manufacturing method is described herein for the fabrication of periodic three-dimensional (3D) hierarchical nanostructures in a highly scalable and tunable manner. This nanofabrication technique exploits the selected and repeated etching of spherical particles that serve as resist material and that can be shaped in parallel for each processing step. The method enables the fabrication of periodic, vertically aligned nanotubes at the wafer scale with nanometer-scale control in three dimensions including outer/inner diameters, heights/hole-depths, and pitches. The method was utilized to construct 3D periodic hierarchical hybrid silicon and hybrid nanostructures such as multi-level solid/hollow nanotowers where the height and diameter of each level of each structure can be configured precisely as well as 3D concentric plasmonic supported metal nanodisk/nanorings with tunable optical properties on a variety of substrates.

公开(公告)号：US11037794B2

公开(公告)日：2021-06-15

申请号：US16583101

申请日：2019-09-25

申请人： The Regents of the University of California

发明人： Xiaobin Xu ,  Qing Yang ,  Natcha Wattanatorn ,  Chuanzhen Zhao ,  Logan A. Stewart ,  Steven J. Jonas ,  Paul S. Weiss

IPC分类号： H01L21/308 ,  H01L21/3065 ,  B81C1/00 ,  B82Y40/00

摘要： A robust and general fabrication/manufacturing method is described herein for the fabrication of periodic three-dimensional (3D) hierarchical nanostructures in a highly scalable and tunable manner. This nanofabrication technique exploits the selected and repeated etching of spherical particles that serve as resist material and that can be shaped in parallel for each processing step. The method enables the fabrication of periodic, vertically aligned nanotubes at the wafer scale with nanometer-scale control in three dimensions including outer/inner diameters, heights/hole-depths, and pitches. The method was utilized to construct 3D periodic hierarchical hybrid silicon and hybrid nanostructures such as multi-level solid/hollow nanotowers where the height and diameter of each level of each structure can be configured precisely as well as 3D concentric plasmonic supported metal nanodisk/nanorings with tunable optical properties on a variety of substrates.

公开(公告)号：US20200347409A1

公开(公告)日：2020-11-05

申请号：US16962509

申请日：2019-01-29

申请人： THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Paul S. Weiss ,  Hsian-Rong Tseng ,  Xiaobin Xu ,  Natcha Wattanatorn ,  Qing Yang ,  Steven J. Jonas

IPC分类号： C12N15/87 ,  G01N33/543

摘要： A method of transporting biomolecular cargo intracellularly into cells includes the operations of providing magnetic nanostructures (e.g., nanospears, nanostars, nanorods, and other nanometer-sized structures) carrying the biomolecular cargo thereon and applying an external magnetic field to move the magnetic nanostructures into physical contact with at least some of the cells (or the cells into the magnetic nanostructures). The magnetic nanostructures move into physical contact with a single cell, a subset of cells, or all cells. The external magnetic field may be applied by a moving permanent magnet although an electromagnetic may also be used. The biomolecular cargo may include a molecule, a plurality of molecules, or higher order biological constructs. For example, the biological construct may include DNA plasmids, small interfering RNA, proteins, or targeted nuclease gene-editing cargo such as zinc-finger nucleases, transcription activator-like effector nucleases, Cas9 protein, Cas9 mRNA, and associated guide RNA sequences.