公开(公告)号：US09062368B2

公开(公告)日：2015-06-23

申请号：US13652593

申请日：2012-10-16

Applicant: The Regents of the University of Michigan

Inventor： Stephen R. Forrest ,  Garen Vartanian ,  Cedric Rolin

IPC: C23C14/52 ,  C23C14/12 ,  C23C14/24 ,  C23C14/54 ,  G01N21/64 ,  G01N21/84

CPC classification number: C23C14/12 ,  C23C14/24 ,  C23C14/52 ,  C23C14/547 ,  G01N21/64 ,  G01N21/6489 ,  G01N2021/8416

Abstract: A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.

Abstract translation: 一种在沉积薄膜的处理室中沉积光活性有机分子的薄膜同时实时气相光活性有机分子的原位监测方法包括在处理室中照射气相光活性有机分子 在沉积一种或多种有机材料的膜并测量所得到的有机材料的光致发光强度的同时来自辐射源的辐射。 可以从实际的光致发光强度数据确定与沉积工艺相关联的一个或多个处理参数，从而为沉积工艺提供有用的反馈。

公开(公告)号：US20140106062A1

公开(公告)日：2014-04-17

申请号：US13652593

申请日：2012-10-16

Applicant: THE REGENTS OF THE UNIVERSITY OF MICHIGAN

Inventor： Stephen R. Forrest ,  Garen Vartanian ,  Cedric Rolin

IPC: C23C16/52

CPC classification number: C23C14/12 ,  C23C14/24 ,  C23C14/52 ,  C23C14/547 ,  G01N21/64 ,  G01N21/6489 ,  G01N2021/8416

Abstract: A method for in-situ monitoring of gas-phase photoactive organic molecules in real time while depositing a film of the photoactive organic molecules on a substrate in a processing chamber for depositing the film includes irradiating the gas-phase photoactive organic molecules in the processing chamber with a radiation from a radiation source in-situ while depositing the film of the one or more organic materials and measuring the intensity of the resulting photoluminescence emission from the organic material. One or more processing parameters associated with the deposition process can be determined from the photoluminescence intensity data in real time providing useful feedback on the deposition process.

Abstract translation: 一种在沉积薄膜的处理室中沉积光活性有机分子的薄膜同时实时气相光活性有机分子的原位监测方法包括在处理室中照射气相光活性有机分子 在沉积一种或多种有机材料的膜并测量所得到的有机材料的光致发光强度的同时来自辐射源的辐射。 可以从实际的光致发光强度数据确定与沉积工艺相关联的一个或多个处理参数，从而为沉积工艺提供有用的反馈。