公开(公告)号：US10147870B2

公开(公告)日：2018-12-04

申请号：US15526713

申请日：2015-11-12

Applicant: THE TRUSTEES OF DARTMOUTH COLLEGE

Inventor： John X. J. Zhang ,  Dajing Chen

IPC: H01L41/04 ,  H01L41/047 ,  H01L41/193 ,  H01L41/45 ,  H01L41/09 ,  H01L41/113 ,  H01L41/08

Abstract: A method for producing a porous piezoelectric polymer film with a dense surface, includes depositing a polymer solution onto a substrate to form a polymer film including a solvent; evaporating a portion of the solvent to form the dense surface away from the substrate; forming water droplets in interior of the polymer film; and substantially evaporating the water droplets and remaining solvent to form porous interior. A piezoelectric composition includes a piezoelectric material with a porous interior and a dense surface for interfacing with an electrode. A piezoelectric device includes a first electrode; a porous piezoelectric film with a dense surface and porous interior, wherein the porous piezoelectric film is deposited on the first electrode and the dense surface is away from the first electrode; and a second electrode deposited on the dense surface for, together with the first electrode, providing an electrical interface for the porous piezoelectric film.