公开(公告)号：US3692413A

公开(公告)日：1972-09-19

申请号：US3692413D

申请日：1970-11-18

Applicant: THOMSON CSF

Inventor： MARCY RAYMOND ,  BOUYGUES JEAN ,  LACOMBAT MICHEL

IPC: G01B9/02 ,  G03F7/20 ,  C01B11/26 ,  B26D7/16

CPC classification number: G03F7/70716 ,  G01B9/02019 ,  G01B9/02021 ,  G01B9/02027 ,  Y10T83/889

Abstract: The invention relates to a system for displacing an object supported on a carriage sliding above a bench, in such manner as to follow accurately a rectilinear trajectory. The lateral and rotational deviations of the object from the ideal trajectory are sensed by means of interferometer optical means which control a plurality of electromechanical transducers for cancelling out said deviations.

Abstract translation: 本发明涉及一种用于使支撑在滑板上方的滑架上的物体移动的系统，以便精确地遵循直线轨迹。 通过干涉仪光学装置来感测物体与理想轨迹的横向和旋转偏差，该干涉仪光学装置控制多个机电换能器以消除所述偏差。

公开(公告)号：US3903435A

公开(公告)日：1975-09-02

申请号：US45363774

申请日：1974-03-21

Applicant: THOMSON CSF

Inventor： BOUYGUES JEAN ,  GERARD RENE

IPC: H02N2/00 ,  B23Q23/00 ,  G03F7/20 ,  H01L41/053 ,  H01L41/083 ,  H02N2/04 ,  H05K13/00 ,  H01V7/00

CPC classification number: G03F7/70691 ,  B23Q23/00 ,  H01L41/0536 ,  H01L41/0831 ,  H05K13/0015

Abstract: A system of piezoelectric wedges having high accurate and stable characteristics, which system can readily be introduced into a mechanical assembly, is provided. To this end, a stack of piezoelectric ceramic discs is surrounded by a steel component of suitable elasticity, exhibiting two terminal blocks and two thin drilled out lateral cheeks. The stack is prestressed by the action of a screw which moves two spacers towards each other, repelling a chamfered end piece at the same time. The application of a positive or negative direct voltage to the piezoelectric discs results in an extension or shortening of proportional magnitude, along the axis of the component.

Abstract translation: 提供了具有高精度和稳定特性的压电楔的系统，该系统可以容易地被引入到机械组件中。 为此，一叠压电陶瓷盘被具有合适弹性的钢构件包围，呈现出两个接线端子和两个薄的外侧面板。 堆叠通过螺钉的作用进行预应力，该螺钉使两个间隔件朝向彼此移动，同时排斥倒角端部件。 将正或负直接电压施加到压电盘导致沿着部件的轴线的比例大小的延伸或缩短。

公开(公告)号：US3860124A

公开(公告)日：1975-01-14

申请号：US40556773

申请日：1973-10-11

Applicant: THOMSON CSF

Inventor： BOUYGUES JEAN ,  GERARD RENE

IPC: H01J37/317 ,  B25J7/00 ,  C23C14/50 ,  C23C14/56 ,  H01L21/265 ,  H01L21/68 ,  B65G1/16

CPC classification number: B25J7/00

Abstract: A device makes it possible to position in the evacuated enclosure of an irradiation apparatus, (an electron beam apparatus for instance), with an accuracy of the order of 1/100 mm a sample holder on a cross-slide table, without having to break the vacuum and by using a remote-control arrangement. In this device, an arm is movable along a fixed axis. This arm terminates in a fork and serves to transfer the object holder from a lateral airlock to said table. A shaft perpendicular to the moving arm, through the medium of an eccentric finger ensures the locking of the object holder to a ''''line-point-area'''' kind of support carried by said table.

Abstract translation: 一种装置可以将放置在辐射装置（例如，电子束装置）的抽真空的外壳中，将准确度为1/100mm的样品架放置在十字滑台上，而不必断裂 真空和使用遥控装置。 在该装置中，臂可沿固定轴线移动。 该臂终止于叉子中，用于将物体保持器从侧面气闸转移到所述工作台。 垂直于移动臂的轴通过偏心手指的介质确保物体保持器锁定到由所述台承载的“线点区域”类型的支撑。