公开(公告)号：US3632205A

公开(公告)日：1972-01-04

申请号：US3632205D

申请日：1970-01-26

Applicant: THOMSON CSF

Inventor： MARCY RAYMOND

IPC: B23K26/08 ,  B25H7/00 ,  G02F1/31 ,  G03F7/20 ,  G06K1/12 ,  H01L21/00 ,  G03B27/42 ,  G03B27/58

CPC classification number: H01L21/67005 ,  B23K26/0853 ,  B25H7/00 ,  G02F1/31 ,  G03F7/704 ,  G03F7/70466 ,  G06K1/126

Abstract: To provide for digital positioning, without inertia of moving parts, a laser beam is transmitted to a substrate which is to be exposed, etched, or the like, particularly when microcircuits are to be produced, by monitoring the displacement of the substrate, mechanically, in two mutually perpendicular directions and positioning the laser beam, as monitored, in at least one direction by controlling voltages applied to a deflector cell in the path of the laser beam, by digitally, selectively, energizing an electro optical crystal effective to rotate the polarized laser beam through a plane of 90*, followed by a doubly refracting crystal which deviates the path of the laser beam, depending on its direction of polarization with respect to the optical axis of the crystal, so that, by successive deflections, the beam, from the laser, can be positioned in predetermined locations on the substrate. The entire arrangement is preferably computer controlled, so that data inserted into the computer will cause deflection of the laser beam in accordance with a predetermined program.

Abstract translation: 为了提供数字定位，没有运动部件的惯性，激光束被传递到待暴露，蚀刻等的基板，特别是当要生产微电路时，通过机械地监测基板的位移， 在两个相互垂直的方向上并且通过控制施加到激光束路径中的偏转器单元的电压，以至少一个方向来定位激光束，通过数字地选择性地激励有效旋转极化的电光晶体 激光束通过90°的平面，随后是双折射晶体，其根据其相对于晶体的光轴的偏振方向偏离激光束的路径，使得通过连续的偏转，光束， 可以从激光器定位在基板上的预定位置。 整个布置优选地是计算机控制的，使得插入到计算机中的数据将导致根据预定程序的激光束的偏转。

公开(公告)号：US3692413A

公开(公告)日：1972-09-19

申请号：US3692413D

申请日：1970-11-18

Applicant: THOMSON CSF

Inventor： MARCY RAYMOND ,  BOUYGUES JEAN ,  LACOMBAT MICHEL

IPC: G01B9/02 ,  G03F7/20 ,  C01B11/26 ,  B26D7/16

CPC classification number: G03F7/70716 ,  G01B9/02019 ,  G01B9/02021 ,  G01B9/02027 ,  Y10T83/889

Abstract: The invention relates to a system for displacing an object supported on a carriage sliding above a bench, in such manner as to follow accurately a rectilinear trajectory. The lateral and rotational deviations of the object from the ideal trajectory are sensed by means of interferometer optical means which control a plurality of electromechanical transducers for cancelling out said deviations.

Abstract translation: 本发明涉及一种用于使支撑在滑板上方的滑架上的物体移动的系统，以便精确地遵循直线轨迹。 通过干涉仪光学装置来感测物体与理想轨迹的横向和旋转偏差，该干涉仪光学装置控制多个机电换能器以消除所述偏差。