公开(公告)号：US3789253A

公开(公告)日：1974-01-29

申请号：US3789253D

申请日：1972-06-22

Applicant: THOMSON CSF

Inventor： KERVIZIC J ,  MASIC R ,  SHROFF A ,  WARNECKE R

IPC: H01J27/10 ,  H05H1/02

CPC classification number: H01J27/10 ,  Y10T29/49982

Abstract: The invention relates to ion sources having two ionization chambers and more particularly to chemical and heat resistant crucibles for use with said sources. The crucible in accordance with the invention is a hollow box of pyrolytic tungsten having two opposite openings in its lateral wall. The crucible is manufactured from a pyrolytic tungsten deposite made on a copper mandrel which is dissolved in an etching bath.

Abstract translation: 本发明涉及具有两个电离室的离子源，更具体地涉及用于所述源的化学和耐热坩埚。

公开(公告)号：US3770870A

公开(公告)日：1973-11-06

申请号：US3770870D

申请日：1972-12-22

Applicant: THOMSON CSF

Inventor： KERVIZIC J ,  MASIC R ,  WARNECKE R

IPC: H01T23/00 ,  H01J27/20 ,  H01J39/26

CPC classification number: H01J27/20

Abstract: Turret device making it possible to successively introduce, in the ionization chamber of an ion source, crucibles containing different kinds of elements, without any need to interrupt the operation of the source. This device comprises a detachable rotatable barrel associated with cylindrical support-members 8 carrying the crucibles 1, means being provided for rotating the barrel and for translating any one of the crucibles toward the ionization chamber C. This turret device is suitable for an ion source successively producion ions of arsenic, phosphorus, aluminium, silicium, for example.

Abstract translation: 转塔装置使得可以在离子源的离子化室中连续地引入含有不同种类元素的坩埚，而不需要中断源的操作。 该装置包括与可承载坩埚1的圆柱形支撑构件8相关联的可拆卸的旋转筒，用于旋转筒体并将任何一个坩埚朝向电离室C平移的装置。该转塔装置适用于连续的离子源 砷，磷，铝，硅等的生成离子。