公开(公告)号：US20230220531A1

公开(公告)日：2023-07-13

申请号：US17796886

申请日：2021-03-04

Applicant: TOCALO CO., LTD.

Inventor： Kazuo HAMASHIMA ,  Masashi MORISASA ,  Shinsuke ANAI

IPC: C23C4/06 ,  H01J37/32

CPC classification number: C23C4/06 ,  H01J37/32495 ,  C23C4/134

Abstract: To provide a new tungsten-based thermal spray coating suitable as e.g. a component for plasma etching device using halogen gas, and a material for thermal spraying for obtaining the thermal spray coating.
A thermal spray coating characterized by containing tungsten as a matrix phase and oxides containing silicon and boron as a dispersed phase, and a component for plasma etching device having such a thermal spray coating. A material for thermal spraying characterized by containing from 1 to 7 wt % of silicon, from 0.5 to 3 wt % of boron and the reminder being tungsten and unavoidable impurities, and a method for producing a thermal spray coating by thermally spraying the material for thermal spraying.