公开(公告)号：US20200286718A1

公开(公告)日：2020-09-10

申请号：US16764042

申请日：2018-10-29

Applicant: TOCALO CO., LTD.

Inventor： Shikou ABUKAWA ,  Kensuke TAGUCHI ,  Yu ASAKIMORI ,  Ryutaro KAWAMURA

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H05B3/03 ,  H05B3/28 ,  H05B1/02

Abstract: The heater component (1) has a substrate part (2), and a thin coating heater (4) which is equipped outside this substrate part (2) and generates heat by power supply. The thin coating heater (4) is formed of a thermal sprayed coating. The thin coating heater (4) has a heater body (10) and a heater extension part (11). The heater body (10) is arranged on a first end face (2a) of the substrate part (2). The heater extension part (11) is extended from the heater body (10) to a second end face (2b) of the substrate part (2) through a side surface (2c) of the substrate part (2). A tip part (11s) of the heater extension part (11) is a heater power supplying part (12) for supplying electric power to the heater body (10).

公开(公告)号：US20220208578A1

公开(公告)日：2022-06-30

申请号：US17595548

申请日：2020-05-19

Applicant: TOCALO CO., LTD.

Inventor： Ryutaro KAWAMURA ,  Kensuke TAGUCHI

IPC: H01L21/67 ,  G05D23/19 ,  G05D23/24 ,  H05B1/02 ,  G01K7/18

Abstract: A temperature control unit has a temperature control unit body, a temperature control part provided inside the temperature control unit body, which raises and lowers a surface temperature of the temperature control unit body on a side where a temperature control object is located, and a thin coating temperature measuring resistance part composed of a thermal sprayed coating. The thin coating temperature measuring resistance part is formed over a certain range in a surface on the side where the temperature control object is located, and which is provided inside the temperature control unit body on a side closer to the temperature control object than the temperature control part. The thin coating temperature measuring resistance part can accurately measure an average temperature of a temperature control surface.

公开(公告)号：US20230079853A1

公开(公告)日：2023-03-16

申请号：US18057187

申请日：2022-11-18

Applicant: TOCALO CO., LTD.

Inventor： Shikou ABUKAWA ,  Kensuke TAGUCHI ,  Yu ASAKIMORI ,  Ryutaro KAWAMURA

IPC: H01J37/32 ,  H01L21/683 ,  H01L21/687 ,  H05B1/02 ,  H05B3/03 ,  H05B3/28

Abstract: A heater component has a substrate part and a thin coating heater which is equipped outside this substrate part and generates heat by power supply. The thin coating heater is formed of a thermal sprayed coating. The thin coating heater has a heater body and a heater extension part. The heater body is arranged on a first end face of the substrate part. The heater extension part is extended from the heater body to a second end face of the substrate part through a side surface of the substrate part. A tip part of the heater extension part is a heater power supplying part for supplying electric power to the heater body.