公开(公告)号：US20130092264A1

公开(公告)日：2013-04-18

申请号：US13650247

申请日：2012-10-12

Applicant: TOKYO ELECTRON LIMITED

Inventor： Tsuneyuki OKABE ,  Shuji MORIYA ,  Kazushige MATSUNO

IPC: F17D3/00

CPC classification number: G05D7/0635 ,  G01F1/68 ,  G01F5/00 ,  Y10T137/7759 ,  Y10T137/7761 ,  Y10T137/8158

Abstract: The flow rate controller controlling a flow rate of gas supplied through a gas passage includes: a main gas pipe; a flow rate detecting unit detecting the flow rate of gas supplied through the main gas pipe and outputting a flow rate signal; a flow rate control valve mechanism controlling a flow rate; a conversion data storage unit storing a plurality of pieces of conversion data corresponding to a plurality of gaseous species, to indicate a relationship between a flow rate instruction signal input from outside and a target flow rate; and a flow rate control main body which selects the corresponding conversion data from the conversion data based on a gaseous species selection signal input from outside, calculates the target flow rate based on the flow rate instruction signal, and controls the flow rate control valve mechanism based on the target flow rate and the flow rate signal.

Abstract translation: 控制通过气体通道供给的气体的流量的流量控制器包括：主气体管道; 流量检测单元，检测通过主气体管道供给的气体的流量，并输出流量信号; 控制流量的流量控制阀机构; 存储对应于多个气态物质的多个转换数据的转换数据存储单元，以指示从外部输入的流量指令信号与目标流量之间的关系; 以及流量控制主体，其基于从外部输入的气体种类选择信号从转换数据中选择相应的转换数据，基于流量指令信号计算目标流量，并且基于流量控制阀机构控制 对目标流量和流量信号。