公开(公告)号：US20200286752A1

公开(公告)日：2020-09-10

申请号：US16809741

申请日：2020-03-05

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI ,  Seiichi KAISE ,  Masahiro NUMAKURA ,  Yuki TAKEYAMA

IPC: H01L21/673 ,  H01L21/687 ,  H01L21/67 ,  B65G47/90

Abstract: A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.

公开(公告)号：US20230290660A1

公开(公告)日：2023-09-14

申请号：US18198928

申请日：2023-05-18

Applicant: TOKYO ELECTRON LIMITED

Inventor： Toshiaki TOYOMAKI ,  Seiichi KAISE ,  Masahiro NUMAKURA ,  Yuki TAKEYAMA

IPC: H01L21/673 ,  H01L21/687 ,  B65G47/90 ,  H01L21/67

CPC classification number: H01L21/6732 ,  H01L21/68707 ,  B65G47/90 ,  H01L21/67167 ,  H01L21/67265

Abstract: A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.