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公开(公告)号:US20240151641A1
公开(公告)日:2024-05-09
申请号:US18279888
申请日:2022-03-01
Inventor: Naoto KAKUTA , Rintaro TAKAGI , Shintaro OZAWA , Takayoshi KANEKO
IPC: G01N21/3554 , G01N21/3504 , G01N21/359
CPC classification number: G01N21/3554 , G01N21/359 , G01N2021/354 , G01N2201/0238 , G01N2201/06113 , G01N2201/0639 , G01N2201/065
Abstract: A water vapor distribution measurement apparatus comprises: a light source that emits near-infrared light; a near-infrared light measurement device that is located across a measurement space from the light source and that measures the near-infrared light; an optical system that expands and applies the near-infrared light emitted from the light source in the measurement space in which a cross-section of the measurement space perpendicular to a direction connecting the light source to the near-infrared light measurement device has an area; and a distribution deriving means for deriving a water vapor distribution in the cross-section of the measurement space on the basis of a measurement result obtained by the near-infrared light measurement device. Water vapor in a measurement region having a prescribed size can be measured by this water vapor distribution measurement apparatus.