公开(公告)号：US20210407800A1

公开(公告)日：2021-12-30

申请号：US17475287

申请日：2021-09-14

Applicant: TOPPAN INC.

Inventor： Mikio SHINNO ,  Reiji TERADA ,  Kenta TAKEDA ,  Akihiko KOBAYASHI

IPC: H01L21/033 ,  H01L51/56 ,  C23C16/04 ,  H01L51/00 ,  H01L21/67

Abstract: A method includes: preparing a metal sheet and a glass substrate in which an absolute value of a difference in linear expansion coefficient between the glass substrate and the metal sheet is less than or equal to 1.3×10−6/° C. in a temperature range between 25° C. and 100° C. inclusive; joining the glass substrate to the metal sheet with a plastic layer in between; forming a mask plate from the metal sheet by forming mask holes in the metal sheet joined to the glass substrate; joining, to a mask frame, a surface of the mask plate that is opposite to a surface in contact with the plastic layer, the mask frame having a higher rigidity than the mask plate and having a shape that surrounds the entire mask holes; and removing the plastic layer and the glass substrate from the mask plate joined to the mask frame.