公开(公告)号：US20190049840A1

公开(公告)日：2019-02-14

申请号：US16078432

申请日：2017-03-09

Applicant: TORAY INDUSTRIES, INC.

Inventor： Yohei KONOSHIMA ,  Mitsuhito SUWA ,  Chika HIBINO ,  Yuka YAMASHIKI

IPC: G03F7/033 ,  G03F7/038 ,  G03F7/031

CPC classification number: G03F7/033 ,  G03F7/031 ,  G03F7/038 ,  G03F7/0388 ,  G06F3/044 ,  G06F2203/04103

Abstract: An object of the present invention is to provide a transparent photosensitive material that is usable as an interlayer insulating film for metal wires, is excellent in migration resistance and substrate adhesiveness under high temperature and high humidity conditions, and is satisfactory in patternability. The photosensitive resin composition of the present invention contains an acrylic polymer (A1) having, in a side chain thereof, a polymerizable group, a cardo based resin (A2) having a polymerizable group and an alkali-soluble group, and a photopolymerization initiator (B), and contents of the acrylic polymer (A1) and the cardo based resin (A2) satisfy a weight ratio of 1:10 to 10:1.