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公开(公告)号：US10093044B2
公开(公告)日：2018-10-09
申请号：US14946915
申请日：2015-11-20
发明人： Yoshio Mizuta , Manabu Takakuwa , Masato Suzuki
摘要： In an imprinting apparatus according to one embodiment, rear surfaces of first and second templates are suctioned. A correction information calculating device calculates a second response coefficient of the second template out of first response coefficients based on a flatness relational expression and flatness of the second template. The first response coefficients are actual amounts of positional slippage of the first template from a first input adjustment value. The flatness relational expression indicates a relationship between flatness of the first template and the first response coefficients. A shape and a size of the second template are adjusted using the second response coefficient.
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公开(公告)号：US10022748B2
公开(公告)日：2018-07-17
申请号：US14793848
申请日：2015-07-08
摘要： According to one embodiment, a stencil mask includes a first opening and a second opening, the first opening is provided corresponding to a mark region in a template, the second opening is provided adjacent to the first opening, and the diameter of a circle circumscribing the second opening is smaller than the diameter of a circle circumscribing the first opening.
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公开(公告)号：US10040219B2
公开(公告)日：2018-08-07
申请号：US14015803
申请日：2013-08-30
发明人： Yoko Takekawa , Ryouichi Inanami , Masafumi Asano , Kazuhiro Takahata , Sachiko Kobayashi , Shigeki Nojima , Yohko Furutono , Masato Suzuki , Kenji Konomi
摘要： According to one embodiment, a mold includes a base, a first concave pattern, a second concave pattern, and a third concave pattern. The base includes a first surface and a pedestal projecting from the first surface. The pedestal includes a first region and a second region disposed outside the first region. The first concave pattern is formed in the first region. The second concave pattern is formed in the second region. The third concave pattern extends from the first region to the second region.
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