公开(公告)号：US12100610B2

公开(公告)日：2024-09-24

申请号：US17897417

申请日：2022-08-29

Applicant: TOTO LTD.

Inventor： Yuki Sasaki ,  Jun Shiraishi ,  Yutaka Momiyama ,  Reo Kawano

IPC: H01L21/683

CPC classification number: H01L21/6833

Abstract: An electrostatic chuck includes a ceramic dielectric substrate, a base plate, a bonding part, a gas inlet path, a counterbore part, a ceramic porous part, and an elastic body. The base plate supports the ceramic dielectric substrate. The bonding part is located between the ceramic dielectric substrate and the base plate. The gas inlet path extends through the ceramic dielectric substrate, the base plate, and the bonding part. The gas inlet path includes a first hole part, a second hole part and a third hole part. The first hole part is positioned at the ceramic dielectric substrate. The third hole part is positioned at the bonding part. The counterbore part is located in the first hole part. The ceramic porous part is located in the counterbore part. The elastic body faces an end part of the bonding part at the third hole part side.

公开(公告)号：US12074014B2

公开(公告)日：2024-08-27

申请号：US17897445

申请日：2022-08-29

Applicant: TOTO LTD.

Inventor： Yuki Sasaki ,  Jun Shiraishi ,  Yutaka Momiyama ,  Reo Kawano

IPC: H01L21/683 ,  H01J37/32

CPC classification number: H01J37/32715 ,  H01J2237/2007

Abstract: An electrostatic chuck includes a ceramic dielectric substrate, a base plate, a bonding part, a gas inlet path, a counterbore part, and a ceramic porous part. The bonding part is located between the ceramic dielectric substrate and the base plate. The gas inlet path extends through the ceramic dielectric substrate, the base plate, and the bonding part. The gas inlet path includes a first hole part, a second hole part, and a third hole part. The first hole part is positioned at the ceramic dielectric substrate. The second hole part is positioned at the base plate. The third hole part is positioned at the bonding part. The counterbore part is located in at least one of the first hole part or the second hole part. The ceramic porous part is located in the counterbore part. The ceramic porous part includes an exposed surface exposed in the third hole part.