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公开(公告)号：US20240200221A1
公开(公告)日：2024-06-20
申请号：US18482323
申请日：2023-10-06
IPC分类号： C25D17/00
CPC分类号： C25D17/002
摘要： The film formation device includes an anode made of an insoluble porous body, an electrolyte membrane disposed between a substrate serving as an anode and a cathode, and a housing provided with an accommodation chamber for storing a plating solution containing metal ions between the anode and the electrolyte membrane. The film formation device further includes a diaphragm that covers a cathode side of the anode and is attached so as to be in contact with the cathode side of the anode. The diaphragm is permeable to water and hydrogen ions and impermeable to oxygen gas. The anode is attached so as to close the opening on the side opposite to the cathode side of the accommodation housing so that the cathode side is exposed to the accommodation chamber via the diaphragm and the side opposite to the cathode side is exposed to the outside of the accommodation housing.
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2.发明公开公开(公告)号：US20240141533A1
公开(公告)日：2024-05-02
申请号：US18488155
申请日：2023-10-17
发明人： Haruki KONDOH , Koji INAGAKI , Keiji KURODA , Soma HIGASHIKOZONO
摘要： The masking material includes a penetrating portion according to a predetermined pattern. The masking material includes a mask portion and at least the mask portion contacting the substrate is made of an elastic material. The penetrating portion includes an expanded portion that is expanded outwardly from a portion contacting the substrate toward the electrolyte membrane in a thickness direction of the mask portion such that in a state where the mask portion is elastically deformed by a pressing force of the electrolyte membrane, a shape of a cross section of a formation space of the penetrating portion in which the metal film is to be formed becomes rectangular.
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公开(公告)号：US20220154362A1
公开(公告)日：2022-05-19
申请号：US17523591
申请日：2021-11-10
发明人： Akira KATO , Haruki KONDOH , Soma HIGASHIKOZONO
摘要： A film formation apparatus for forming a metal film includes an anode, a solid electrolyte membrane disposed between the anode and a substrate that serves as a cathode, a power supply device that applies a voltage between the anode and the cathode, a solution container that contains a solution between the anode and the solid electrolyte membrane, the solution containing metal ions, and a pressure device that pressurizes the solid electrolyte membrane to the cathode side with a fluid pressure of the solution. The film formation apparatus includes an auxiliary cathode disposed in a peripheral area of the film formation region when the surface of the substrate is viewed in plain view, the auxiliary cathode having an electric potential lower than an electric potential of the anode.
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