摘要:
A substrate fixture pallet includes a body part configured to receive a substrate to be processed and a lid part attached movably to the body part so as to fix the substrate when closed relative to the body part. The lid part is configured to form a gap between the body part and the lid part when closed relative to the body part so as to allow the suction air of a dust collector for suctioning cutting powder to be generated at a time of processing the substrate to flow through the gap when the substrate fixture pallet is attached to the dust collector.
摘要:
A dust collecting mechanism is a dust collecting mechanism that sucks up and collects dust generated by a machining apparatus, including a suction section for sucking up the dust by exerting sucking force on a workpiece, a sucking force generating mechanism for generating sucking force acting on the suction section, and a suction pipe enabling communication between the suction section and the sucking force generating mechanism, wherein the suction pipe includes an opening section extending from the inside to the outside thereof and a shutter mechanism for opening and closing the opening section, and wherein the pressure inside the suction pipe can be switched between an atmospheric pressure state and a sucking force generating state by causing the shutter mechanism to open or close the opening section while sucking force is generated inside the suction pipe by operating the sucking force generating mechanism.