METHOD OF FORMING METAL INTERCONNECT FOR SEMICONDUCTOR DEVICE BASED ON SELECTIVE DAMASCENE PROCESS
    1.
    发明申请
    METHOD OF FORMING METAL INTERCONNECT FOR SEMICONDUCTOR DEVICE BASED ON SELECTIVE DAMASCENE PROCESS 审中-公开
    基于选择性DAMASCENE工艺形成金属互连的半导体器件的方法

    公开(公告)号:US20060258144A1

    公开(公告)日:2006-11-16

    申请号:US11382175

    申请日:2006-05-08

    IPC分类号: H01L21/4763

    CPC分类号: H01L21/76879 B82Y30/00

    摘要: Provided is a method for forming metal interconnect only in desired regions of a semiconductor device based on selective damascene using an insulation material against plating to form the metal interconnect without a Chemical Mechanical Polishing (CMP) or an additional lithography process. The selective damascene is stable and effective in the respect of cost and simplifies the semiconductor interconnect forming process.

    摘要翻译: 提供了仅在半导体器件的期望区域中形成金属互连的方法,该半导体器件基于选择性镶嵌,其使用绝缘材料以抵抗电镀以形成金属互连,而无需化学机械抛光(CMP)或附加光刻工艺。 选择性镶嵌在成本方面是稳定和有效的,并且简化了半导体互连成形工艺。

    Transformers, balanced-unbalanced transformers (baluns) and Integrated circuits including the same
    2.
    发明申请
    Transformers, balanced-unbalanced transformers (baluns) and Integrated circuits including the same 有权
    变压器,平衡不平衡变压器(baluns)和包括相同的集成电路

    公开(公告)号:US20090284339A1

    公开(公告)日:2009-11-19

    申请号:US12453465

    申请日:2009-05-12

    IPC分类号: H01F5/00

    摘要: A transformer of fully symmetric structure includes a primary coil assembly and a secondary coil assembly. The primary coil assembly includes a plurality of primary coils formed in a plurality of metal layers, and a first interlayer connection unit for connecting the primary coils. The secondary coil assembly includes a plurality of secondary coils formed in the plurality of metal layers, and a second interlayer connection unit for connecting the secondary coils. The primary and secondary coils formed in the same metal layer are concentric and axisymmetric with respect to a diameter line passing through a planar center point. A balanced-unbalanced transformer (balun) is a type of transformer that may be used to convert an unbalanced signal to a balanced one or vice versa. An integrated circuit may include a semiconductor substrate and a transformer. Electrical elements such as transistors may be formed on the semiconductor substrate.

    摘要翻译: 完全对称结构的变压器包括初级线圈组件和次级线圈组件。 初级线圈组件包括形成在多个金属层中的多个初级线圈和用于连接初级线圈的第一层间连接单元。 次级线圈组件包括形成在多个金属层中的多个次级线圈和用于连接次级线圈的第二层间连接单元。 形成在同一金属层中的初级和次级线圈相对于通过平面中心点的直径线是同心的和轴对称的。 平衡 - 不平衡变压器(balun)是一种变压器,可用于将不平衡信号转换成平衡信号,反之亦然。 集成电路可以包括半导体衬底和变压器。 诸如晶体管的电气元件可以形成在半导体衬底上。

    TRANSFORMERS AND BALUNS
    3.
    发明申请
    TRANSFORMERS AND BALUNS 审中-公开
    变压器和平台

    公开(公告)号:US20080174396A1

    公开(公告)日:2008-07-24

    申请号:US11972662

    申请日:2008-01-11

    IPC分类号: H01F27/28

    摘要: A transformer includes a primary coil assembly and a secondary coil assembly juxtaposed in a stack and which are electromagnetically inductively coupled and substantially symmetrical to one another. The primary coil assembly includes a plurality of primary coils coplanar with first insulation layers, respectively, and symmetrical to each other, and a first via unit connecting adjacent ones of the primary coils to each other. The secondary coil assembly includes a plurality of secondary coils coplanar with a plurality of second insulation layers, respectively, and symmetrical to each other, and a second via unit connecting adjacent ones of the secondary coils to each other.

    摘要翻译: 变压器包括初级线圈组件和并联在堆叠中并且彼此电磁感应耦合和基本对称的次级线圈组件。 初级线圈组件包括分别与第一绝缘层共面并且彼此对称的多个初级线圈,以及将相邻的初级线圈彼此连接的第一通孔单元。 次级线圈组件包括分别与彼此对称的多个第二绝缘层共面的多个次级线圈和将相邻的次级线圈彼此连接的第二通孔单元。