摘要:
Provided is a method for forming metal interconnect only in desired regions of a semiconductor device based on selective damascene using an insulation material against plating to form the metal interconnect without a Chemical Mechanical Polishing (CMP) or an additional lithography process. The selective damascene is stable and effective in the respect of cost and simplifies the semiconductor interconnect forming process.
摘要:
A transformer of fully symmetric structure includes a primary coil assembly and a secondary coil assembly. The primary coil assembly includes a plurality of primary coils formed in a plurality of metal layers, and a first interlayer connection unit for connecting the primary coils. The secondary coil assembly includes a plurality of secondary coils formed in the plurality of metal layers, and a second interlayer connection unit for connecting the secondary coils. The primary and secondary coils formed in the same metal layer are concentric and axisymmetric with respect to a diameter line passing through a planar center point. A balanced-unbalanced transformer (balun) is a type of transformer that may be used to convert an unbalanced signal to a balanced one or vice versa. An integrated circuit may include a semiconductor substrate and a transformer. Electrical elements such as transistors may be formed on the semiconductor substrate.
摘要:
A transformer includes a primary coil assembly and a secondary coil assembly juxtaposed in a stack and which are electromagnetically inductively coupled and substantially symmetrical to one another. The primary coil assembly includes a plurality of primary coils coplanar with first insulation layers, respectively, and symmetrical to each other, and a first via unit connecting adjacent ones of the primary coils to each other. The secondary coil assembly includes a plurality of secondary coils coplanar with a plurality of second insulation layers, respectively, and symmetrical to each other, and a second via unit connecting adjacent ones of the secondary coils to each other.