摘要:
Disclosed herein is an MEMS variable capacitor and its driving method, the MEMS variable capacitor including, a first electrode, a second electrode floating over the first electrode upper part, a fixed electrode separated at the second electrode side surface, and a drifting electrode placed between the second electrode and the fixed electrode, connected to the second electrode, and physically contacting the fixed electrode by a voltage applied to the fixed electrode.
摘要:
Disclosed is a humidity sensor including: a conductive material in which electric charges are charged; a charger which charges the electric charges in the conductive material; and a measurer which measures a change amount of the electric charges charged in the conductive material.
摘要:
Disclosed are a light guide plate and a backlight unit. The backlight unit according to the present invention includes: a light guide plate; a light source disposed on one side of the light guide plate; and a reflective plate disposed under the light guide plate, wherein, in the cross section of one side of the light guide plate, the light guide plate includes a plurality of unit slits including a first slit and a second slit, wherein the first slit and the second slit are inclined from a top surface toward the inside of the light guide plate with respect to a vertical direction of the top surface, and wherein the first slit and the second slit are symmetrical to each other with respect to the middle portion of the unit slit.
摘要:
Disclosed herein is an MEMS variable capacitor and its driving method, the MEMS variable capacitor including, a first electrode, a second electrode floating over the first electrode upper part, a fixed electrode separated at the second electrode side surface, and a drifting electrode placed between the second electrode and the fixed electrode, connected to the second electrode, and physically contacting the fixed electrode by a voltage applied to the fixed electrode.
摘要:
In the present invention, a nanoporous membrane having a columnar structure is manufactured through a deposition technology used in a semiconductor process, and the size of a nanopore is adjusted by etching the lower surface of the manufactured nanoporous membrane or using a seed layer and a nanobead layer so that scaling up is available at a lowered process temperature and the size of the nanopore can be easily adjusted when manufacturing the nanoporous membrane having a columnar structure.
摘要:
The present invention relates to a micro-electromechanical system (MEMS) and, more particularly, to an electrostatic actuator, and a driving method thereof and an application device thereof. The electrostatic actuator in accordance with the present invention comprises a fixed electrode, an electric charge charging unit electrically insulated from the fixed electrode, and a moving electrode spaced apart from the fixed electrode and the electric charge charging unit. In accordance with the present invention, the electrostatic actuator with a very low driving voltage and an arbitrarily controllable driving voltage when compared with a conventional electrostatic actuator is provided. In addition, the electrostatic actuator having durability against external noise and enabling a reliable consecutive operation is provided. Further, in accordance with the present invention, non-volatile mechanical memory, a logic circuit and a switch employing the electrostatic actuator are provided.
摘要:
A method of fabricating a polymer or resist pattern over a substrate includes coating a photosensitive polymer or resist over the substrate to form a polymer or resist layer, determining a portion of the polymer or resist layer to be exposed to light, placing a light adjusting layer in an optical path of light shone on the polymer or resist layer, and adjusting the light adjusting layer to adjust a direction or intensity of the light shone on the polymer or resist layer. Based on the method, it is easy to fabricate a polymer or resist pattern, a metal film pattern, metal pattern structure, and a polymer mold, each having three-dimensional structures with various slopes or shapes by adjusting a direction or intensity of incident light when performing a lithography process.
摘要:
A method for controlling a memory array using a mechanical switch according to the present invention, in which the memory array comprises; a plurality of word lines; a plurality of bit lines intersecting each other with the plurality of word lines; a gate electrode connected to each of the word lines; a drain electrode spaced apart from the gate electrode and connected to a capacitor; and a source electrode comprises: an anchor part spaced apart from the gate electrode and connected to each of the bit lines; a mobile part where a dimple is formed, comprises the steps of: applying a first voltage V1 to the bit line selected from the plurality of bit lines; applying a second voltage V2 greater than a sum of the first voltage V1 and a pull-in voltage Vpi to the word lines selected from the plurality of word lines; and applying a voltage smaller than a sum of a erase voltage Verase and the pull-in voltage Vpi and a voltage greater than a difference between a write voltage Vwrite and the pull-in voltage Vpi to the word lines unselected from the plurality of word lines.
摘要:
The present invention relates to a micro-electromechnical system (MEMS) and, more particularly, to an electrostatic actuator, and a driving method thereof and an application device thereof.The electrostatic actuator in accordance with the present invention comprises a fixed electrode, an electric charge charging unit electrically insulated from the fixed electrode, and a moving electrode spaced apart from the fixed electrode and the electric charge charging unit.In accordance with the present invention, the electrostatic actuator with a very low driving voltage and an arbitrarily controllable driving voltage when compared with a conventional electrostatic actuator is provided.In addition, the electrostatic actuator having durability against external noise and enabling a reliable consecutive operation is provided. Further, in accordance with the present invention, non-volatile mechanical memory, a logic circuit and a switch employing the electrostatic actuator are provided,
摘要:
A display device is provided. The display device includes: a substrate including a unit display area, a fixing member that is formed on the substrate and that is electrically isolated, an insulating layer that is formed on the fixing member, a fixing electrode that is formed on the insulating layer and that is electrically connected to a power source, and a plurality of moving members with one end fixed to the insulating layer and positioned apart by a distance from the fixing electrode. The plurality of moving members and the fixing electrode are positioned within the unit display area.