公开(公告)号：US20100326599A1

公开(公告)日：2010-12-30

申请号：US12600655

申请日：2008-05-16

申请人： Tae-Kyong Hwang ,  Heaung-Shig Oh ,  Myung-Keun Noh

发明人： Tae-Kyong Hwang ,  Heaung-Shig Oh ,  Myung-Keun Noh

IPC分类号： H01L21/306

CPC分类号： H01L21/67063 ,  B01D2258/0216 ,  F04D19/046

摘要： Disclosed is an integrated vacuum producing apparatus, which vacuumizes a process chamber of an apparatus for manufacturing semiconductors, flat panel displays, etc. or exhausts gaseous material and by-products generated within the process chamber to an outside so as to purify it. Gaseous material, e.g. gas, generated within a chamber for manufacturing a semiconductor, a flat panel display, etc. is exhausted through each separate exhaust line so as to be purified. Therefore, excessive operation of a purifying system can be prevented through distribution of exhaust gas so that life span can be extended according to the operation of the apparatus. Also, exhausting can be smoothly achieved through each exhaust line so that it is possible to prevent delay of a semi-conductor manufacturing process due to inability of exhausting, and to easily remove non-reacted gas and by-products in an exhausting process.

摘要翻译： 公开了一种集成真空制造装置，其将用于制造半导体，平板显示器等的装置的处理室真空化，或将处理室内产生的气态材料和副产物排出到外部，以便净化它。 气体材料，例如。 在用于制造半导体的腔室内产生的气体，平板显示器等通过每个分离的排气管线排出，以便被净化。 因此，能够通过分配排气来防止净化系统的过度运转，从而可以根据设备的运行来延长使用寿命。 另外，能够通过各排气管线平滑地进行排气，从而可以防止由于排气不能引起的半导体制造工序的延迟，并且能够在排气过程中容易地除去未反应的气体和副产物。

公开(公告)号：US07611340B2

公开(公告)日：2009-11-03

申请号：US11878665

申请日：2007-07-26

申请人： Tae-Kyong Hwang ,  Myung Keun Noh ,  Heaung Shig Oh

发明人： Tae-Kyong Hwang ,  Myung Keun Noh ,  Heaung Shig Oh

IPC分类号： F04C18/18 ,  F04C25/02

CPC分类号： F04C18/16 ,  F04C18/084 ,  F04C18/086 ,  F04C18/126 ,  F04C23/005 ,  F04C29/0085 ,  F04C2220/12 ,  F04C2220/30 ,  F04C2280/02 ,  F05C2253/20

摘要： A complex dry vacuum pump including a root rotor and a screw rotor is disclosed for manufacturing semiconductors and/or displays in a vacuum state in a process chamber, and discharging gaseous material and/or by-products generated during manufacturing to the exterior of the process chamber. The pump can provide high gas compression transfer efficiency so as to form a vacuum in the process chamber and/or keep high gas compression transfer efficiency when the gaseous material and/or by-products are discharged. Balance between the root rotor and the screw rotor can prevent vibration and noise generated in the vacuum pump, and molding material associated with the pump may allow a stator coil to be separated and prevent various by-products from flowing from the vacuum pump.

摘要翻译： 公开了一种包括根转子和螺杆转子的复式干式真空泵，用于在处理室中以真空状态制造半导体和/或显示器，并且将在制造过程中产生的气态材料和/或副产物排放到工艺外部 房间。 泵可以提供高的气体压缩传递效率，以便在气体材料和/或副产物排放时在处理室中形成真空和/或保持高的气体压缩传递效率。 根转子和螺杆转子之间的平衡可以防止在真空泵中产生的振动和噪声，并且与泵相关联的模制材料可以允许定子线圈被分离并且防止各种副产物从真空泵流出。

公开(公告)号：US20080025858A1

公开(公告)日：2008-01-31

申请号：US11878665

申请日：2007-07-26

申请人： Tae-Kyong Hwang ,  Myung Noh ,  Heaung Oh

发明人： Tae-Kyong Hwang ,  Myung Noh ,  Heaung Oh

IPC分类号： F04C23/00

CPC分类号： F04C18/16 ,  F04C18/084 ,  F04C18/086 ,  F04C18/126 ,  F04C23/005 ,  F04C29/0085 ,  F04C2220/12 ,  F04C2220/30 ,  F04C2280/02 ,  F05C2253/20

摘要： A complex dry vacuum pump including a root rotor and a screw rotor is disclosed for manufacturing semiconductors and/or displays in a vacuum state in a process chamber, and discharging gaseous material and/or by-products generated during manufacturing to the exterior of the process chamber. The pump can provide high gas compression transfer efficiency so as to form a vacuum in the process chamber and/or keep high gas compression transfer efficiency when the gaseous material and/or by-products are discharged. Balance between the root rotor and the screw rotor can prevent vibration and noise generated in the vacuum pump, and molding material associated with the pump may allow a stator coil to be separated and prevent various by-products from flowing from the vacuum pump.

摘要翻译： 公开了一种包括根转子和螺杆转子的复式干式真空泵，用于在处理室中以真空状态制造半导体和/或显示器，并且将在制造过程中产生的气态材料和/或副产物排放到工艺外部 房间。 泵可以提供高的气体压缩传递效率，以便在气体材料和/或副产物排放时在处理室中形成真空和/或保持高的气体压缩传递效率。 根转子和螺杆转子之间的平衡可以防止在真空泵中产生的振动和噪声，并且与泵相关联的模制材料可以允许定子线圈被分离并且防止各种副产物从真空泵流出。