公开(公告)号：US06788990B1

公开(公告)日：2004-09-07

申请号：US09656839

申请日：2000-09-07

申请人： Taichi Yanaru ,  Masataka Okabe ,  Hirofumi Ohtsuka

发明人： Taichi Yanaru ,  Masataka Okabe ,  Hirofumi Ohtsuka

IPC分类号： G06F1900

CPC分类号： G05B19/41865 ,  G05B2219/32097 ,  G05B2219/32263 ,  G05B2219/45031 ,  Y02P90/20

摘要： A process control device controls a plurality of processing devices placed in parallel to perform at least two process steps for consecutively processing workpieces in a lot. The process control device includes a device group information for grouping of a plurality of processing devices into a plurality of device groups. For example, when the workpieces are semiconductor devices, processing devices having identical deviating characteristics are grouped into the same group to perform a plurality of photolithographic steps. The process control device further includes a device group selecting unit for selecting the device group such that the lot is processed in the second process step using a processing device included in the same device group as a processing device used in the first process step.

摘要翻译： 过程控制装置控制并行放置的多个处理装置，以执行至少两个用于连续处理工件的处理步骤。 过程控制装置包括用于将多个处理装置分组成多个装置组的装置组信息。 例如，当工件是半导体器件时，具有相同偏差特性的处理器件被分组成相同的组以执行多个光刻步骤。 过程控制装置还包括：设备组选择单元，用于选择设备组，使得使用包括在与第一处理步骤中使用的处理设备相同的设备组中的处理设备在第二处理步骤中处理批次。

公开(公告)号：US06577972B2

公开(公告)日：2003-06-10

申请号：US09792052

申请日：2001-02-26

申请人： Taichi Yanaru ,  Masataka Okabe ,  Hirofumi Ohtsuka

发明人： Taichi Yanaru ,  Masataka Okabe ,  Hirofumi Ohtsuka

IPC分类号： G01N3700

CPC分类号： H01L22/20 ,  G05B19/41875 ,  G05B2219/32196 ,  G05B2219/32197 ,  Y02P90/22

摘要： In a sampling inspection managing system, for each processing step, a setting is made on a processing flow table as to whether the processing step concerned is a step for determining the sampling inspection frequency of a specific inspection step. For a processing step which is set as “being a step for determining the sampling inspection frequency”, the inspection frequency of the specific inspection step is set on a sampling frequency setting table for every kind of product to be processed. Further, for the processing step, the processing number of lots is counted for every kind of product in a count table, and, on the basis of the processing number thus counted, a judgment is made as to whether each lot is a lot to be inspected in the specific inspection step. The judgment result is stored as information for the lot in a lot table. Accordingly, the inspection can be carried out at an inspection frequency suitable for every kind of product.

摘要翻译： 在采样检查管理系统中，对于每个处理步骤，在处理流程表上进行关于所述处理步骤是否是用于确定特定检查步骤的采样检查频率的步骤的设置。 对于被设定为“作为确定采样检查频率的步骤”的处理步骤，在针对要处理的每种产品的采样频率设定表上设定特定检查步骤的检查频率。 此外，对于处理步骤，对计数表中的各种产品对批次的处理数进行计数，并且根据这样计数的处理次数，判断每批是否是很多 在具体的检查步骤检查。 判断结果存储在批次表中的批次信息。 因此，可以在适合于各种产品的检查频率下进行检查。

公开(公告)号：US06535778B2

公开(公告)日：2003-03-18

申请号：US09793736

申请日：2001-02-27

申请人： Masataka Okabe ,  Hirofumi Ohtsuka ,  Taichi Yanaru

发明人： Masataka Okabe ,  Hirofumi Ohtsuka ,  Taichi Yanaru

IPC分类号： G06F700

CPC分类号： H01L21/67276 ,  G05B15/02

摘要： In a process control method, when T1+Tw+T2

摘要翻译： 在过程控制方法中，当满足T1 + Tw + T2

公开(公告)号：US06733243B2

公开(公告)日：2004-05-11

申请号：US10115009

申请日：2002-04-04

申请人： Ryoji Ogata ,  Hirofumi Ohtsuka ,  Taichi Yanaru

发明人： Ryoji Ogata ,  Hirofumi Ohtsuka ,  Taichi Yanaru

IPC分类号： B65H100

CPC分类号： H01L21/67276

摘要： An interbay transportation system includes bays in which process equipment are provided, stockers provided for the individual bays, and a vehicle traveling through the stockers for transporting a semi-processed product from one of the stockers to another. Timing to start transportation is determined according to the operation status of the process equipment and the number of semi-processed products in the stocker.

摘要翻译： 间隔运输系统包括提供过程设备的托架，为各个托架提供的储料器，以及通过储料器运输的车辆，用于将半加工产品从其中一个储存器运送到另一个。 开始运输的时间根据过程设备的运行状况和储存者半加工产品的数量确定。

公开(公告)号：US06687568B2

公开(公告)日：2004-02-03

申请号：US10128308

申请日：2002-04-24

申请人： Hirofumi Ohtsuka ,  Ryoji Ogata ,  Taichi Yanaru

发明人： Hirofumi Ohtsuka ,  Ryoji Ogata ,  Taichi Yanaru

IPC分类号： G06F700

CPC分类号： B65G1/137 ,  B65G1/06

摘要： A transportation system includes lifts for inter-floor carriage, a carrier cart for intra-floor carriage, and a transit stocker for loading/unloading an article to/from the lift. For each of the lifts, operation status, that is, operating or not, is recorded in a database. The operating rate of each lift, carriage queue for each lift, and an inventory of each transit stocker might also be recorded in the database. When carriage of an article is required, a lift optimum for the carriage is selected from among the lifts based on the information recorded on the database.

摘要翻译： 运输系统包括地板间运输的升降机，用于楼内运输的托运车，以及用于将物品装载/从电梯装卸的运输货架。 对于每个电梯，操作状态，即运行状态，是否记录在数据库中。 每个电梯的运行速度，每个电梯的运输队列以及每个过境货车的库存也可能记录在数据库中。 当需要运送物品时，根据记录在数据库中的信息，从升降机中选择最佳的升降机。