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公开(公告)号:US20250062153A1
公开(公告)日:2025-02-20
申请号:US18936869
申请日:2024-11-04
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chien-Fa LEE , Hsu-Shui LIU , Jiun-Rong PAI , Shou-Wen KUO , Jian-Hung CHEN , M.C. LIN , C.C. CHIEN , Hsuan LEE , Boris HUANG
IPC: H01L21/683 , H01L21/02 , H01L21/304 , H01L21/66
Abstract: A system and method for cleaning ring frames is disclosed. In one embodiment, a ring frame processing system includes: a plurality of blades for mechanically removing tapes and tape residues from surfaces of a ring frame; a plurality of wheel brushes for conditioning the surfaces of the ring frame; and a transport mechanism for transporting the ring frame.
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公开(公告)号:US20210257247A1
公开(公告)日:2021-08-19
申请号:US17308786
申请日:2021-05-05
Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
Inventor: Chien-Fa LEE , Hsu-Shui LIU , Jiun-Rong PAI , Shou-Wen KUO , Jian-Hung CHENG , M.C. LIN , C.C. CHIEN , Hsuan LEE , Boris HUANG
IPC: H01L21/683 , H01L21/304 , H01L21/66 , H01L21/02
Abstract: A system and method for cleaning and inspecting ring frames is disclosed here. In one embodiment, a ring frame processing system includes: a cleaning station configured to remove a first tape on a first surface of a ring frame using a first blade, clean first adhesive residues from the first tape on the first surface of the ring frame using a first wheel brush, and remove second adhesive residues from a second tape on a second surface of the ring frame using a second blade; and an inspection station, wherein the inspection station comprises an automated optical inspection system configured to determine the cleanness of the first and second surfaces of the ring frame after cleaning.
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