公开(公告)号：US20250062153A1

公开(公告)日：2025-02-20

申请号：US18936869

申请日：2024-11-04

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chien-Fa LEE ,  Hsu-Shui LIU ,  Jiun-Rong PAI ,  Shou-Wen KUO ,  Jian-Hung CHEN ,  M.C. LIN ,  C.C. CHIEN ,  Hsuan LEE ,  Boris HUANG

IPC: H01L21/683 ,  H01L21/02 ,  H01L21/304 ,  H01L21/66

Abstract: A system and method for cleaning ring frames is disclosed. In one embodiment, a ring frame processing system includes: a plurality of blades for mechanically removing tapes and tape residues from surfaces of a ring frame; a plurality of wheel brushes for conditioning the surfaces of the ring frame; and a transport mechanism for transporting the ring frame.