公开(公告)号：US11042148B2

公开(公告)日：2021-06-22

申请号：US15992207

申请日：2018-05-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Lin-Kai Huang ,  Wei-Chi Su ,  Yi-Ching Liu ,  Cheng-Hsuan Liu

IPC: G05B19/418 ,  H01L21/67 ,  H01L21/66

Abstract: In the disclosure, a scheduled route of a lot may be rescheduled to another fabrication tool performing the same fabrication processes as to expand the production line and throughput. The controlling method includes at least the following steps. The lot is scheduled with a predetermined route having a plurality of fabrication tools configured to process the lot with a plurality of fabrication processes in a sequence. The lot is monitored as the lot is being processed by the fabrication tools in each of the fabrication processes, and inspection data is generated for each fabrication process. The lot is rescheduled to another fabrication tool outside of the predetermined route for one of the fabrication processes according to a release rule and the inspection data.

公开(公告)号：US20190155260A1

公开(公告)日：2019-05-23

申请号：US15992207

申请日：2018-05-30

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Lin-Kai Huang ,  Wei-Chi Su ,  Yi-Ching Liu ,  Cheng-Hsuan Liu

IPC: G05B19/418 ,  H01L21/66 ,  H01L21/67

Abstract: In the disclosure, a scheduled route of a lot may be rescheduled to another fabrication tool performing the same fabrication processes as to expand the production line and throughput. The controlling method includes at least the following steps. The lot is scheduled with a predetermined route having a plurality of fabrication tools configured to process the lot with a plurality of fabrication processes in a sequence. The lot is monitored as the lot is being processed by the fabrication tools in each of the fabrication processes, and inspection data is generated for each fabrication process. The lot is rescheduled to another fabrication tool outside of the predetermined route for one of the fabrication processes according to a release rule and the inspection data.