公开(公告)号：US20200035628A1

公开(公告)日：2020-01-30

申请号：US16503773

申请日：2019-07-05

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Po-Hsun HUANG ,  Po-Han WANG ,  Ing-Ju LEE ,  Chao-Lung CHEN ,  Cheng-Ming WU

IPC: H01L23/00 ,  H01L23/532 ,  H01L23/528 ,  H01L21/768

Abstract: Methods of fabricating semiconductor devices are provided. The method includes providing a substrate and forming an interconnect structure on the substrate. The interconnect structure includes a top metal layer. The method also includes forming a first barrier film on the top metal layer using a first deposition process with a first level of power, and forming a second barrier film on the first barrier film using a second deposition process with a second level of power that is lower than the first level of power. The method further includes forming an aluminum-containing layer on the second barrier film. In addition, the method includes patterning the first barrier film, the second barrier film and the aluminum-containing layer to form a conductive pad structure.

公开(公告)号：US20200173051A1

公开(公告)日：2020-06-04

申请号：US16677563

申请日：2019-11-07

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jun-Nan Nian ,  Shiu-Ko JANGJIAN ,  Ting-Chun WANG ,  Ing-Ju LEE ,  Yu-Ren PENG ,  Yao-Hsiang LIANG

IPC: C25D17/00 ,  C25D21/12

Abstract: An electrochemical plating (ECP) system is provided. The ECP system includes an ECP cell comprising a plating solution for an ECP process, a sensor configured to in situ measure an interface resistance between a plated metal and an electrolyte in the plating solution as the ECP process continues, a plating solution supply system in fluid communication with the ECP cell and configured to supply the plating solution to the ECP cell, and a control system operably coupled to the ECP cell, the sensor and the plating solution supply system. The control system is configured to compare the interface resistance with a threshold resistance and to adjust a composition of the plating solution in response to the interface resistance being below the threshold resistance.