公开(公告)号：US10651066B2

公开(公告)日：2020-05-12

申请号：US15879651

申请日：2018-01-25

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Powen Huang ,  Yao-Yuan Shang ,  Kuo-Shu Tseng ,  Yen-Yu Chen ,  Chun-Chih Lin ,  Yi-Ming Dai

IPC: H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  H01L21/02 ,  G01D7/00 ,  G01D5/00 ,  B08B3/04

Abstract: A method for fault detection in a fabrication facility is provided. The method includes moving a wafer carrier using a transportation apparatus. The method further includes measuring an environmental condition within the wafer carrier or around the wafer carrier using a metrology tool positioned on the wafer carrier during the movement of the wafer carrier. The method also includes issuing a warning when the detected environmental condition is outside a range of acceptable values.

公开(公告)号：US11387123B2

公开(公告)日：2022-07-12

申请号：US16857446

申请日：2020-04-24

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Powen Huang ,  Yao-Yuan Shang ,  Kuo-Shu Tseng ,  Yen-Yu Chen ,  Chun-Chih Lin ,  Yi-Ming Dai

IPC: G05B19/418 ,  H01L21/67 ,  H01L21/677 ,  H01L21/673 ,  H01L21/02 ,  G01D7/00 ,  G01D5/00 ,  B08B3/04

Abstract: A method for fault detection in a fabrication facility is provided. The method includes moving a wafer carrier along a predetermined path multiple times using a transportation apparatus. The method also includes collecting data associated with an environmental condition within the wafer carrier or around the wafer carrier using a metrology tool on the predetermined path in a previous movement of the transportation apparatus. The method further includes measuring the environmental condition within the wafer carrier or around the wafer carrier using the metrology tool during the movement of the wafer carrier. In addition, the method includes issuing a warning when the measured environmental condition is outside a range of acceptable values. The range of acceptable values is derived from the data collected in the previous movement of the transportation apparatus.