公开(公告)号：US20040004140A1

公开(公告)日：2004-01-08

申请号：US10189669

申请日：2002-07-03

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Rong Hau Hsueh ,  Simon King ,  Yung-Dar Chen

IPC: B05B005/00

CPC classification number: H05F3/04 ,  B05B1/005 ,  B05B5/025 ,  Y10S134/902

Abstract: The present invention discloses an anti-electrostatic discharge spray gun apparatus and method for preventing crystallization of particles formed as a result of electrostatic discharge from forming on a spray gun nozzle and an associated pair of oppositely charged electrodes disposed on the gun. The apparatus has a housing; a nozzle attached to the housing for dispensing gas; means for dispensing a gas through the nozzle; means for electrostatically discharging a gas dispensed through the nozzle; and means for restricting the flow of a gas through the nozzle. The means for dispensing and restricting flow of a gas through the nozzle may be either a bypass piping having a flow control means or a stopper that operates to provide a constant but low volume flow of an inert gas such as nitrogen to the nozzle to prevent particle build up or crystallization from occurring.

Abstract translation: 本发明公开了一种防静电喷枪装置和防止由喷枪喷嘴形成的颗粒形成的结晶的方法，以及设置在喷枪上的相关的一对相对带电的电极。 该装置具有壳体; 连接到壳体以分配气体的喷嘴; 用于通过喷嘴分配气体的装置; 用于静电排放通过喷嘴分配的气体的装置; 以及用于限制气体通过喷嘴的流动的装置。 用于分配和限制气体通过喷嘴的流动的装置可以是具有流量控制装置或塞子的旁路管道，该流量控制装置或塞子用于向喷嘴提供恒定但低体积的惰性气体如氮气的流量，以防止颗粒 积聚或结晶发生。