公开(公告)号：US20040197433A1

公开(公告)日：2004-10-07

申请号：US10831311

申请日：2004-04-26

Inventor： Shouichi Terada ,  Naoto Yoshitaka ,  Masami Akimoto

IPC: G03C005/00 ,  B05B005/00 ,  B28B017/00

CPC classification number: B23K26/0853 ,  B08B7/0042 ,  B23K26/146 ,  B23K26/147 ,  H01L21/67051 ,  H01L21/67057 ,  H01L21/6708 ,  H01L21/67259 ,  H01L21/681 ,  H01L21/6838 ,  H01L23/544 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A film removing apparatus comprises a substrate holding portion which holds a substrate having a coating film, a laser source which locally irradiates an alignment mark position of the substrate on the substrate holding portion with laser beams, and partially abrades the coating film from the substrate, a fluid supply mechanism including a main nozzle which supplies a predetermined fluid to the alignment mark position, a recovery mechanism having a suction opening which sucks the predetermined fluid supplied to the alignment mark position together with an abraded film component on the substrate, and a guide member which guides the predetermined fluid emitted from the main nozzle to the alignment mark position, and guides the predetermined fluid and the abraded film component to the suction opening of the recovery mechanism so as not to be diffused/leaked around the alignment mark position.

Abstract translation: 一种除膜装置，包括：保持具有涂膜的基板的基板保持部，激光源，用激光束在基板保持部上局部照射基板的对准标记位置的激光源，并从基板部分地研磨涂膜， 流体供给机构，包括：向对准标记位置供给预定流体的主喷嘴;回收机构，具有将供给到所述对准标记位置的规定流体与所述基板上的研磨膜成分吸引的吸入口， 将从主喷嘴排出的预定流体引导到对准标记位置的构件，将预定流体和磨损膜组件引导到回收机构的吸入口，以便不会在对准标记位置周围扩散/泄漏。

公开(公告)号：US20040126615A1

公开(公告)日：2004-07-01

申请号：US10149467

申请日：2003-02-19

Inventor： Bradford K Mortz ,  Robert H. Miller

IPC: B05B005/00

CPC classification number: C09K11/025 ,  C09K11/02 ,  C09K11/7731 ,  C09K11/7786 ,  D06M11/69 ,  D06M23/08 ,  D06P1/0012 ,  Y10T428/25

Abstract: A process for incorporating a long persistent phosphor into a fabric material which occurs by firing a phosphor whithin a crucible, then grinding the resulting aggregate into a phosphor particulate of specified size, encapsulating the phosphor particulate witthin a water impervious coating material and then applying a specified ratio by weight of the encapsulated phosphor particulates into the fabric material. Further, a fibrous product is described incorporating encapsulated long persistent phosphor particles.

Abstract translation: 将长持续荧光体掺入通过在坩埚中焙烧的荧光体而发生的长持久性荧光体的方法，然后将得到的聚集体研磨成规定尺寸的荧光体颗粒，将不透水涂层材料的荧光体颗粒包封，然后施加指定的 包封的磷光体颗粒的重量比与织物材料的比例。 此外，描述了包含长效持久荧光粉颗粒的纤维制品。

公开(公告)号：US20040115343A1

公开(公告)日：2004-06-17

申请号：US10473698

申请日：2003-09-29

Inventor： Peter Francis Carcia ,  Laurent Dieu

IPC: B05B005/00

CPC classification number: G03F1/32 ,  C23C14/0052 ,  C23C14/0641 ,  C23C14/0676 ,  C23C14/46

Abstract: A single ion-beam deposition, or a dual ion-beam deposition process for fabricating attenuating phase shift photomask blanks capable of producing a phase shift of 180null and having an optical transmissivity of at least 0.001 at selected lithographic wavelengths

Abstract translation: 单个离子束沉积或用于制造衰减相移光掩模坯料的双离子束沉积工艺，其能够产生180°的相移并且在选定的光刻波长<400nm处具有至少0.001的光学透射率，包括在 光学透射和/或一层光学吸收元素或复合材料的周期性或非周期性排列的至少一层。

公开(公告)号：US20040072100A1

公开(公告)日：2004-04-15

申请号：US10654605

申请日：2003-09-04

Inventor： Toshiko Mizokuro ,  Takashi Hiraga ,  Noritaka Yamamoto ,  Hiroyuki Mochizuki ,  Shin Horiuchi ,  Norio Tanaka

IPC: G11B007/24 ,  B05B005/00

CPC classification number: G11B7/245 ,  G11B7/266 ,  Y10S430/146

Abstract: Disclosed is an optical recording medium, comprising a polymer alloy forming a phase-separated domain structure of a coating object, and a volatile substance interacting with the polymer alloy. The volatile substance in a vapor state is deposited on the surface of specific phase-separated domain, and dispersedly infiltrated into the phase-separated domain. The phase-separated domain and the volatile substance chemically interact with each other. The optical recording medium is operable to perform optical recording by utilizing change in the transmittance, reflectance, refractive index or surface potential thereof in response to irradiation of ultraviolet light, visible light, or infrared light from outside. The present invention can provide an optical recording medium suitable for high-density recording in a wide wavelength range.

Abstract translation: 公开了一种光学记录介质，其包含形成涂层物体的相分离畴结构的聚合物合金和与聚合物合金相互作用的挥发性物质。 蒸气状态的挥发性物质沉积在特定相分离区域的表面上，并分散渗入相分离区域。 相分离的结构域和挥发性物质彼此化学相互作用。 通过利用来自外部的紫外光，可见光或红外光的照射，利用透射率，反射率，折射率或表面电位的变化来进行光学记录介质。 本发明可以提供适用于宽波长范围内的高密度记录的光记录介质。

公开(公告)号：US20040063004A1

公开(公告)日：2004-04-01

申请号：US10628059

申请日：2003-07-25

Inventor： Jochen Alkemper ,  Lutz Aschke ,  Hrabanus Hack

IPC: G03F001/00 ,  G02B005/08 ,  G02B005/20 ,  F21V009/04 ,  F21V009/06 ,  B05B005/00 ,  B05D005/06 ,  B32B001/00 ,  B32B009/00 ,  B32B017/06 ,  B32B015/00 ,  H05H001/24

CPC classification number: G03F1/60 ,  B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G03F1/38 ,  Y10T428/265

Abstract: The present invention relates to a substrate in particular of EUV microlithography, to the production of a substrate of this type and to the use of this substrate as a substrate for mirrors and/or masks or mask blanks in particular in EUV microlithography.

Abstract translation: 本发明涉及特别是EUV微光刻技术的基板，这种基板的生产以及该基板作为反射镜和/或掩模或掩模毛坯的基板的使用，特别是在EUV微光刻中。

公开(公告)号：US20040056124A1

公开(公告)日：2004-03-25

申请号：US10252194

申请日：2002-09-23

Applicant: Spraying Systems Co.

Inventor： James Haruch

IPC: B05B005/00

CPC classification number: B05B7/10 ,  B05B7/066 ,  B05B7/0815

Abstract: An external mix air assisted spray nozzle assembly having a nozzle body, and an air cap for a directing pressurized air streams on a discharging liquid stream external to the liquid discharge orifice of the nozzle assembly for atomizing and forming the liquid into the desired spray pattern. The air cap includes an upstream internal air chamber, an external, downstream liquid discharge and mixing chamber, and a central opening coaxial with the liquid discharge orifice communicating between the upstream and downstream chambers. The air cap further includes a plurality of angled pressurized air discharge passages which communicate with an annular plenum of the air chamber disposed in surrounding relation to the central opening for enabling substantially uniform particle breakdown and distribution at lower air pressures than heretofore possible.

Abstract translation: 具有喷嘴主体的外部混合空气辅助喷嘴组件和用于在喷嘴组件的液体排出孔外部的排出液体流上引导加压空气流的空气帽，用于将液体雾化并形成所需的喷射模式。 空气盖包括上游内部空气室，外部，下游液体排出和混合室，以及与在上游室和下游室之间连通的液体排出孔同轴的中心开口。 空气帽还包括多个成角度的加压空气排放通道，其与围绕中心开口设置的空气室的环形增压室连通，使得能够在比以前更低的空气压力下实现基本上均匀的颗粒分解和分布。

公开(公告)号：US20030222225A1

公开(公告)日：2003-12-04

申请号：US10161118

申请日：2002-05-31

Applicant: Nikon Corporation

Inventor： Masayuki Shiraishi

IPC: G21G005/00 ,  G21K005/00 ,  G03B013/28 ,  G02B005/08 ,  G02B005/20 ,  B05B005/00 ,  G03F001/08

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  G03F1/24 ,  G21K1/062

Abstract: Multilayer-film mirrors are disclosed that exhibit high reflectivity to incident X-radiation independently of the angle of incidence and without significantly compromising optical performance. Also disclosed are X-ray optical systems and microlithography apparatus comprising such mirrors. In an embodiment a multilayer-film mirror is formed by alternately laminating Mo layers (a material in which the difference between its refractive index in the weak X-ray band and its refractive index in a vacuum is great) and Si layers (a material in which said difference is small) on a substrate. The ratio (null) of the thickness of the Mo layer to the total of the thickness of the Mo layer and the thickness of the Si layer has a distribution based on the distribution of angles of incidence of X-radiation on the mirror surface. By providing null with a distribution that corresponds with the distribution of the angles of incidence in the mirror surface, maximum reflectivity can be obtained at the angles of incidence at various points within the mirror surface. Because there is no need to change the period length in this case, there is no deterioration in the optical performance of the mirror.

Abstract translation: 公开了多层膜反射镜，其独立于入射角显示对入射X射线的高反射率，并且不会显着损害光学性能。 还公开了包括这种反射镜的X射线光学系统和微光刻设备。 在一个实施例中，通过交替层叠Mo层（其中在弱X射线带中的折射率与其真空中的折射率之差大的材料很大）和Si层（在 其表示差异很小）。 Mo层的厚度与Mo层的厚度的总和的比率（Gamma）和Si层的厚度的分布基于镜面上的X射线入射角的分布。 通过向伽马提供与镜面中的入射角分布相对应的分布，可以在镜面内的各个点处的入射角获得最大的反射率。 由于在这种情况下不需要改变周期长度，反射镜的光学性能不会降低。

公开(公告)号：US20030161944A1

公开(公告)日：2003-08-28

申请号：US10085550

申请日：2002-02-26

Applicant: The Regents of the University of California

Inventor： Randy A. Barksdale ,  Ronald B. Robinson ,  Sharon S. Alvarez ,  Gary D. Power

IPC: B05B005/00 ,  B05D003/02 ,  B05D001/12

CPC classification number: C23C14/0629

Abstract: A vacuum deposition process for depositing powdered phosphor on fiber optic face plates, such as the output fiber optic window of gated image intensifiers. The process involves resistive heating vacuum deposition of a powdered phosphor, such as Zn, CD, (S) to a thickness of 7900 Angstroms, for example, after which it is annealed which promotes a columnar growth and makes the phosphor efficient. The thus annealed phosphor can then be directly overcoated with aluminum of a thinner coating than over a powdered phosphor produced by prior known methods due to the smoother surface produced by this process.

Abstract translation: 用于在光纤面板上沉积粉末状磷光体的真空沉积工艺，例如门控图像增强器的输出光纤窗口。 该方法包括电阻加热真空沉积诸如Zn，CD，（S）的粉末状荧光体至7900埃的厚度，然后进行退火，其促进柱状生长并使​​荧光体有效。 因此，由于该方法产生的更平滑的表面，所以这样退火的荧光体可以直接用涂层薄的铝覆盖，而不是由现有已知方法产生的粉状荧光粉。

公开(公告)号：US20030042341A1

公开(公告)日：2003-03-06

申请号：US10213448

申请日：2002-08-07

Inventor： Karl Buschor ,  Felix Mauchle ,  Hanspeter Vieli ,  Silvano Gelain

IPC: B05B005/00

CPC classification number: B05B5/032 ,  B05B5/0533

Abstract: A powder spraycoating apparatus comprising at least one compressed-air outlet (8) connected to a source (14) of compressed air from which it receives compressed air (15) at such a rate and such pressure that the compressed air at the compressed-air outlet (8) shall detach the powder's boundary layer from the powder duct (4) and shall concentrate the powder flow toward the radial flow center and make it swirl, at a site near the downstream end (6) of the powder duct (4).

Abstract translation: 一种粉末喷涂装置，包括连接到压缩空气源（14）的至少一个压缩空气出口（8），压缩空气出口（8）以压缩空气的压缩空气 出口（8）应将粉末的边界层与粉末管道（4）分开，并将粉末流向集中在径向流动中心并使其在粉末管道（4）的下游端（6）附近的位置旋转， 。

公开(公告)号：US20030038193A1

公开(公告)日：2003-02-27

申请号：US09901162

申请日：2001-07-09

Inventor： William R. Rehman ,  Harry J. Lader ,  James W. Messerly ,  Michael Ross Sanner

IPC: B05B005/00

CPC classification number: B05B5/0418 ,  B05B1/02 ,  B05B1/04 ,  B05B1/042 ,  B05B1/26 ,  B05B1/265 ,  B05B5/032 ,  B05B5/04 ,  B05B5/0407 ,  B05B5/0426 ,  B05B5/047 ,  B05B5/053

Abstract: A plurality of unconventional negative tribo-charging materials are described for use as the powder contact surfaces in tribocharging and corona powder spray guns, gun components, and powder delivery system components. The invention also provides a short barrel tribo-charging powder spray gun having an interchangeable powder contact insert and nozzle, with turbulence inducing air jets. The invention further provides novel tribocharging and corona gun designs. Improved powder coating systems are made possible wherein, for example, negative tribo guns can be utilized with negative corona guns to coat different parts of the same workpiece in a powder coating system. Also provided is an inside-out configuration in which pressurized air directs powder coating material outward towards a charging surface. Additional configurations provide air jet induced tribocharging and conventional tribocharging portions combined in a single gun.