公开(公告)号：US20140231671A1

公开(公告)日：2014-08-21

申请号：US13771112

申请日：2013-02-20

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Yu-Ying LU ,  Sung-Po Yang ,  Ding-I Liu ,  Kuo-Shu Tseng ,  Chung-Wen Chang

IPC: B05D3/06

CPC classification number: B05D3/067 ,  H01L21/67115 ,  H01L21/6776

Abstract: A UV curing system includes an enclosure defining an interior, a UV radiation source disposed within the interior of the enclosure, and a first window disposed within the interior of the enclosure. The first window creates a barrier that separates the UV radiation source and a processing chamber. A second window is disposed within the interior of the enclosure at a distance from the first window to define a gas channel. The second window defines a plurality of openings such that the gas channel is in fluid communication with the processing chamber. A gas inlet conduit is in fluid communication with the gas channel and is configured to introduce a cooling gas into the gas channel. A gas outlet is in fluid communication with the processing chamber and is configured to remove gas from the processing chamber.

Abstract translation: UV固化系统包括限定内部的外壳，设置在外壳内部的UV辐射源以及设置在外壳内部的第一窗口。 第一个窗口创建一个隔离UV辐射源和一个处理室的屏障。 第二窗口设置在与第一窗口相距一定距离的外壳的内部，以限定气体通道。 第二窗口限定多个开口，使得气体通道与处理室流体连通。 气体入口导管与气体通道流体连通，并且构造成将冷却气体引入气体通道。 气体出口与处理室流体连通并且被配置为从处理室去除气体。

公开(公告)号：US08872138B2

公开(公告)日：2014-10-28

申请号：US13771112

申请日：2013-02-20

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yu-Ying Lu ,  Sung-Po Yang ,  Ding-I Liu ,  Kuo-Shu Tseng ,  Chung-Wen Chang

IPC: G21K5/04 ,  B05D3/06

CPC classification number: B05D3/067 ,  H01L21/67115 ,  H01L21/6776

Abstract: A UV curing system includes an enclosure defining an interior, a UV radiation source disposed within the interior of the enclosure, and a first window disposed within the interior of the enclosure. The first window creates a barrier that separates the UV radiation source and a processing chamber. A second window is disposed within the interior of the enclosure at a distance from the first window to define a gas channel. The second window defines a plurality of openings such that the gas channel is in fluid communication with the processing chamber. A gas inlet conduit is in fluid communication with the gas channel and is configured to introduce a cooling gas into the gas channel. A gas outlet is in fluid communication with the processing chamber and is configured to remove gas from the processing chamber.

Abstract translation: UV固化系统包括限定内部的外壳，设置在外壳内部的UV辐射源以及设置在外壳内部的第一窗口。 第一个窗口创建一个隔离UV辐射源和一个处理室的屏障。 第二窗口设置在与第一窗口相距一定距离的外壳的内部，以限定气体通道。 第二窗口限定多个开口，使得气体通道与处理室流体连通。 气体入口导管与气体通道流体连通，并且构造成将冷却气体引入气体通道。 气体出口与处理室流体连通并且被配置为从处理室去除气体。