公开(公告)号：US10216879B1

公开(公告)日：2019-02-26

申请号：US15682863

申请日：2017-08-22

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Yi-Shun Huang ,  Wai-Kit Lee ,  Ya-Chin Liang ,  Cheng Hsiao ,  Juan-Yi Chen ,  Li-Chung Hsu ,  Ting-Sheng Huang ,  Ke-Wei Su ,  Chung-Kai Lin ,  Min-Chie Jeng

IPC: G06F17/50 ,  G06F17/30 ,  H01L21/66

Abstract: A method for establishing an aging model of a device is provided. The device is measured to obtain degradation information of the device under an operating condition, wherein the device is a physical device. The degradation information is partitioned into a permanent degradation portion and an impermanent degradation portion. The impermanent degradation portion is differentiated by time to obtain a differential value. The aging model is obtained according to the differential value. When the differential value is greater than zero, a degradation of the device increases over time, and when the differential value is less than zero, the degradation of the device decreases over time.