公开(公告)号：US20250100161A1

公开(公告)日：2025-03-27

申请号：US18974213

申请日：2024-12-09

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Jen-Ti WANG ,  Yi-Ming CHEN ,  Chih-Wei LIN ,  Cheng-Ho HUNG ,  Fu-Hsien LI

IPC: B25J11/00 ,  B23P6/00 ,  B25J1/04 ,  B25J18/00 ,  G01B11/24 ,  G01B11/30 ,  G01N33/00 ,  H01L21/02 ,  H01L21/66 ,  H01L21/673 ,  H01L21/677

Abstract: A method includes receiving a carrier, the carrier including a carrier body, a first filter, and a housing securing the first filter to the carrier body. The method further includes uninstalling the housing from the carrier, replacing the first filter with a second filter, reinstalling the housing on the carrier body, and inspecting the second filter. Inspecting the second filter includes using an automatic inspection mechanism to detect surface flatness of the second filter.

公开(公告)号：US20150330885A1

公开(公告)日：2015-11-19

申请号：US14276545

申请日：2014-05-13

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Ming-Han TSAI ,  Yi-Ming CHEN

IPC: G01N15/06

CPC classification number: G01N15/06 ,  G01N2015/084 ,  H01L21/67393

Abstract: An apparatus applicable to a storage container is provided and includes a filtering cartridge, a gas supply device and a particle counter. The filtering cartridge is configured to be disposed on the storage container. The filtering cartridge includes a flexible housing and a filter. The flexible housing has a first portion and a second portion opposite to the first portion. The flexible housing includes a gas inlet, a first gas outlet and a second gas outlet. The gas inlet is disposed on the first portion. The first gas outlet is disposed on the first portion. The second gas outlet is disposed on the second portion and connected to the storage container. The filter is disposed over the second gas outlet. The gas supply device is connected to the gas inlet, thereby purging gas into the flexible housing. The particle counter is connected to the first gas outlet.

Abstract translation: 提供了一种适用于储存容器的装置，并且包括过滤筒，气体供应装置和颗粒计数器。 过滤筒构造成设置在存储容器上。 过滤筒包括柔性外壳和过滤器。 柔性壳体具有与第一部分相对的第一部分和第二部分。 柔性壳体包括气体入口，第一气体出口和第二气体出口。 气体入口设置在第一部分上。 第一气体出口设置在第一部分上。 第二气体出口设置在第二部分上并连接到储存容器。 过滤器设置在第二气体出口上方。 气体供给装置连接到气体入口，从而将气体吹入柔性壳体。 颗粒计数器连接到第一气体出口。

公开(公告)号：US20160103080A1

公开(公告)日：2016-04-14

申请号：US14513072

申请日：2014-10-13

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.

Inventor： Ming-Han TSAI ,  Sheng-Hsiang CHUANG ,  Guan-Cyun LI ,  Yen-Ju WEI ,  Chiung-Min LIN ,  Yi-Ming CHEN

IPC: G01N21/95

CPC classification number: G01N21/9503

Abstract: A dual-function wafer handling apparatus for handling a wafer includes an aligner for rotating the wafer, an ID reader disposed corresponding to an edge of the wafer for reading an ID of the wafer, and an optical defect inspection unit for capturing images to analysis.

Abstract translation: 用于处理晶片的双功能晶片处理装置包括用于旋转晶片的对准器，对应于晶片的边缘布置的用于读取晶片的ID的ID读取器，以及用于捕获图像以进行分析的光学缺陷检查单元。