SEMICONDUCTOR MEMORY DEVICES AND METHODS OF MANUFACTURING THEREOF

    公开(公告)号:US20220293158A1

    公开(公告)日:2022-09-15

    申请号:US17470854

    申请日:2021-09-09

    IPC分类号: G11C11/22 H01L27/11597

    摘要: A semiconductor device comprises a first conductive structure extending along a vertical direction and a second conductive structure extending along the vertical direction. The second conductive structure is spaced apart from the first conductive structure along a lateral direction. The semiconductor device further comprises a plurality of third conductive structures each extending along the lateral direction. The plurality of third conductive structures are disposed across the first and second conductive structures. The first and second conductive structures each have a varying width along the lateral direction. The plurality of third conductive structures are configured to be applied with respective different voltages in accordance with the varying width of the first and second conductive structures.

    SEMICONDUCTOR MEMORY DEVICES WITH IMPROVED PERFORMANCE

    公开(公告)号:US20240341075A1

    公开(公告)日:2024-10-10

    申请号:US18296010

    申请日:2023-04-05

    IPC分类号: H10B12/00

    CPC分类号: H10B12/00

    摘要: A semiconductor device includes a conductive layer extending along a first lateral direction; a gate dielectric layer disposed over the conductive layer; a channel layer disposed over the gate dielectric layer and extending along a second lateral direction perpendicular to the first lateral direction; a first via-like structure, in direct contact with the channel layer, that is disposed along a first edge of the first channel extending along the second lateral direction; and a second via-like structure, in direct contact with the channel layer, that is disposed along a second, opposite edge of the first channel extending along the second lateral direction. The first via-like structure and second via-like structure are laterally separated apart along a third lateral direction that is clockwise tilted from the second lateral direction with a first positive angle.

    SEMICONDUCTOR MEMORY DEVICES AND METHODS OF MANUFACTURING THEREOF

    公开(公告)号:US20240023338A1

    公开(公告)日:2024-01-18

    申请号:US18361270

    申请日:2023-07-28

    IPC分类号: H10B51/20 H10B51/30

    CPC分类号: H10B51/20 H10B51/30

    摘要: A semiconductor device includes a first conductive structure extending along a vertical direction and a second conductive structure extending along the vertical direction. The second conductive structure is spaced apart from the first conductive structure along a first lateral direction. The semiconductor device includes third conductive structures each extending along the first lateral direction. The third conductive structures are disposed across the first and second conductive structures. The semiconductor device includes a first semiconductor channel extending along the vertical direction. The first semiconductor channel is disposed between the third conductive structures and the first conductive structure, and between the third conductive structures and the second conductive structure. The first and second conductive structures each have a first varying width along the first lateral direction, and the first semiconductor channel has a second varying width along a second lateral direction.

    Semiconductor memory devices and methods of manufacturing thereof

    公开(公告)号:US11758734B2

    公开(公告)日:2023-09-12

    申请号:US17458692

    申请日:2021-08-27

    IPC分类号: H10B51/20 H10B51/30

    CPC分类号: H10B51/20 H10B51/30

    摘要: A semiconductor device includes a first conductive structure extending along a vertical direction and a second conductive structure extending along the vertical direction. The second conductive structure is spaced apart from the first conductive structure along a first lateral direction. The semiconductor device includes third conductive structures each extending along the first lateral direction. The third conductive structures are disposed across the first and second conductive structures. The semiconductor device includes a first semiconductor channel extending along the vertical direction. The first semiconductor channel is disposed between the third conductive structures and the first conductive structure, and between the third conductive structures and the second conductive structure. The first and second conductive structures each have a first varying width along the first lateral direction, and the first semiconductor channel has a second varying width along a second lateral direction.

    SEMICONDUCTOR MEMORY DEVICES AND METHODS OF MANUFACTURING THEREOF

    公开(公告)号:US20230403859A1

    公开(公告)日:2023-12-14

    申请号:US18446043

    申请日:2023-08-08

    IPC分类号: H10B51/20 H10B51/30

    CPC分类号: H10B51/20 H10B51/30

    摘要: A semiconductor device comprises a first conductive structure extending along a vertical direction and a second conductive structure extending along the vertical direction. The second conductive structure is spaced apart from the first conductive structure along a lateral direction. The semiconductor device further comprises a plurality of third conductive structures each extending along the lateral direction. The plurality of third conductive structures are disposed across the first and second conductive structures. The first and second conductive structures each have a varying width along the lateral direction. The plurality of third conductive structures have respective different thicknesses in accordance with the varying width of the first and second conductive structures.

    Semiconductor memory devices and methods of manufacturing thereof

    公开(公告)号:US11705177B2

    公开(公告)日:2023-07-18

    申请号:US17470854

    申请日:2021-09-09

    IPC分类号: G11C11/22 H10B51/20

    摘要: A semiconductor device comprises a first conductive structure extending along a vertical direction and a second conductive structure extending along the vertical direction. The second conductive structure is spaced apart from the first conductive structure along a lateral direction. The semiconductor device further comprises a plurality of third conductive structures each extending along the lateral direction. The plurality of third conductive structures are disposed across the first and second conductive structures. The first and second conductive structures each have a varying width along the lateral direction. The plurality of third conductive structures are configured to be applied with respective different voltages in accordance with the varying width of the first and second conductive structures.

    SEMICONDUCTOR MEMORY DEVICES AND METHODS OF MANUFACTURING THEREOF

    公开(公告)号:US20220285397A1

    公开(公告)日:2022-09-08

    申请号:US17458237

    申请日:2021-08-26

    IPC分类号: H01L27/11597 H01L27/1159

    摘要: A semiconductor device comprises a first conductive structure extending along a vertical direction and a second conductive structure extending along the vertical direction. The second conductive structure is spaced apart from the first conductive structure along a lateral direction. The semiconductor device further comprises a plurality of third conductive structures each extending along the lateral direction. The plurality of third conductive structures are disposed across the first and second conductive structures. The first and second conductive structures each have a varying width along the lateral direction. The plurality of third conductive structures have respective different thicknesses in accordance with the varying width of the first and second conductive structures.

    3D memory device with modulated doped channel

    公开(公告)号:US12029042B2

    公开(公告)日:2024-07-02

    申请号:US17470826

    申请日:2021-09-09

    摘要: A semiconductor device comprises a first conductive structure extending along a vertical direction and a second conductive structuring extending along the vertical direction. The second conductive structure is spaced apart from the first conductive structure along a lateral direction. The semiconductor device further comprises a plurality of third conductive structures each extending along the lateral direction. The plurality of third conductive structures are disposed across the first and second conductive structures. The semiconductor device further comprises a first semiconductor channel extending along the vertical direction. The first semiconductor channel is disposed between the plurality of third conductive structures and the first conductive structure and between the plurality of third conductive structures and the second conductive structure. The first and second conductive structures each have a varying width along the lateral direction, and the first semiconductor channel has a doping concentration varying along the vertical direction.